1991 | Sammelwerksbeitrag | Veröffentlicht | PUB-ID: 1781249
Schmiedeskamp, B., Heidemann, B., Kleineberg, U., Kloidt, A., Kühne, M., Müller, H., Müller, P., Nolting, K., and Heinzmann, U. (1991). “Fabrication and characterization of Si-based soft x-ray mirrors” in X-ray EUV optics for astronomy, microscopy, polarimetry, and projection lithography, Hoover, R. B. ed. Proceedings / SPIE, the International Society for Optical Engineering ; 1343, vol. 1343, (Bellingham, Wash.: SPIE - The International Society for Optical Engineering), 64-72.
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