Implementation of Trusted Manufacturing & AI-based process optimization into microelectronic manufacturing research environments
Becker K-F, Voges S, Fruehauf P, Heimann M, Nerreter S, Blank R, Erdmann M, Gottwald S, Hofmeister A, Hesse M, Thies M, et al. (2021)
In: Proceedings of the 54th IMAPS International Symposium on Microelectronics.
Konferenzbeitrag | Englisch
Download
Es wurden keine Dateien hochgeladen. Nur Publikationsnachweis!
Autor*in
Becker, Karl-Friedrich;
Voges, Steve;
Fruehauf, Peter;
Heimann, Matthias;
Nerreter, Stefan;
Blank, Rene;
Erdmann, Michael;
Gottwald, Stefan;
Hofmeister, Andreas;
Hesse, MarcUniBi 
;
Thies, MichaelUniBi;
Mehrafsun, Salar
Alle
;
Thies, MichaelUniBi;
Mehrafsun, Salar
Alle
Einrichtung
Erscheinungsjahr
2021
Titel des Konferenzbandes
Proceedings of the 54th IMAPS International Symposium on Microelectronics
Konferenz
54th IMAPS International Symposium on Microelectronics
Konferenzort
San Diego
Konferenzdatum
2021-10-11 – 2021-10-14
Page URI
https://pub.uni-bielefeld.de/record/2960507
Zitieren
Becker K-F, Voges S, Fruehauf P, et al. Implementation of Trusted Manufacturing & AI-based process optimization into microelectronic manufacturing research environments. In: Proceedings of the 54th IMAPS International Symposium on Microelectronics. 2021.
Becker, K. - F., Voges, S., Fruehauf, P., Heimann, M., Nerreter, S., Blank, R., Erdmann, M., et al. (2021). Implementation of Trusted Manufacturing & AI-based process optimization into microelectronic manufacturing research environments. Proceedings of the 54th IMAPS International Symposium on Microelectronics
Becker, Karl-Friedrich, Voges, Steve, Fruehauf, Peter, Heimann, Matthias, Nerreter, Stefan, Blank, Rene, Erdmann, Michael, et al. 2021. “Implementation of Trusted Manufacturing & AI-based process optimization into microelectronic manufacturing research environments”. In Proceedings of the 54th IMAPS International Symposium on Microelectronics.
Becker, K. - F., Voges, S., Fruehauf, P., Heimann, M., Nerreter, S., Blank, R., Erdmann, M., Gottwald, S., Hofmeister, A., Hesse, M., et al. (2021). “Implementation of Trusted Manufacturing & AI-based process optimization into microelectronic manufacturing research environments” in Proceedings of the 54th IMAPS International Symposium on Microelectronics.
Becker, K.-F., et al., 2021. Implementation of Trusted Manufacturing & AI-based process optimization into microelectronic manufacturing research environments. In Proceedings of the 54th IMAPS International Symposium on Microelectronics.
K.-F. Becker, et al., “Implementation of Trusted Manufacturing & AI-based process optimization into microelectronic manufacturing research environments”, Proceedings of the 54th IMAPS International Symposium on Microelectronics, 2021.
Becker, K.-F., Voges, S., Fruehauf, P., Heimann, M., Nerreter, S., Blank, R., Erdmann, M., Gottwald, S., Hofmeister, A., Hesse, M., Thies, M., Mehrafsun, S., Fust, R., Beck, E., Pawlikowski, J., Schröder, B., Voigt, C., Braun, T., Schneider-Ramelow, M.: Implementation of Trusted Manufacturing & AI-based process optimization into microelectronic manufacturing research environments. Proceedings of the 54th IMAPS International Symposium on Microelectronics. (2021).
Becker, Karl-Friedrich, Voges, Steve, Fruehauf, Peter, Heimann, Matthias, Nerreter, Stefan, Blank, Rene, Erdmann, Michael, Gottwald, Stefan, Hofmeister, Andreas, Hesse, Marc, Thies, Michael, Mehrafsun, Salar, Fust, Ralf, Beck, Eugen, Pawlikowski, Jakub, Schröder, Bernd, Voigt, Christian, Braun, Tanja, and Schneider-Ramelow, Martin. “Implementation of Trusted Manufacturing & AI-based process optimization into microelectronic manufacturing research environments”. Proceedings of the 54th IMAPS International Symposium on Microelectronics. 2021.
Google Scholar