In situ transformation and cleaning of tin-drop contamination on mirrors for extreme ultraviolet light

Boewering N, Meier C (2018)
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 36(2): 10.

Zeitschriftenaufsatz | Veröffentlicht | Englisch
 
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Abstract / Bemerkung
Tin-drop contamination was cleaned from multilayer-coated mirrors by induction of phase transformation. The beta ->alpha phase transition of tin was induced to initiate material embrittlement and enable the facile removal of thick tin deposits. The necessary steps were performed under high-vacuum conditions for an in situ demonstration of the removal of severe tin contamination from optics used for reflection of extreme ultraviolet light. Molten tin of high purity was dripped onto mirror samples, inoculated with small seed particles of gray tin and then cooled to temperatures in the range of -25 to -40 degrees C. As recorded by photographic imaging, the drops were converted in an evacuated chamber to gray tin by induction of tin pest leading to their disintegration within a few hours. They could then be easily cleaned or fell off from the surface without causing any damage of the multi-layer coating. Cleaning of tin contamination from the mirrors with almost complete structural transformation of the tin drops and subsequent removal by puffs of dry gas could be achieved within a day. The fraction of area coverage of untransformed tin remaining on the samples after cleaning was evaluated from the images and generally found to be well below 1%. After tin dripping, phase transition and cleaning, analysis of the reflectance of a Mo/Si-coated mirror with measurements at wavelengths of 13.6 and 13.5 nm showed a reduction of only 0.5%, with an upper limit of 1%. Published by the AVS.
Erscheinungsjahr
2018
Zeitschriftentitel
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Band
36
Ausgabe
2
Art.-Nr.
10
ISSN
1071-1023
Page URI
https://pub.uni-bielefeld.de/record/2919314

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Boewering N, Meier C. In situ transformation and cleaning of tin-drop contamination on mirrors for extreme ultraviolet light. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. 2018;36(2): 10.
Boewering, N., & Meier, C. (2018). In situ transformation and cleaning of tin-drop contamination on mirrors for extreme ultraviolet light. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 36(2), 10. doi:10.1116/1.5016821
Boewering, N., and Meier, C. (2018). In situ transformation and cleaning of tin-drop contamination on mirrors for extreme ultraviolet light. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 36:10.
Boewering, N., & Meier, C., 2018. In situ transformation and cleaning of tin-drop contamination on mirrors for extreme ultraviolet light. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 36(2): 10.
N. Boewering and C. Meier, “In situ transformation and cleaning of tin-drop contamination on mirrors for extreme ultraviolet light”, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, vol. 36, 2018, : 10.
Boewering, N., Meier, C.: In situ transformation and cleaning of tin-drop contamination on mirrors for extreme ultraviolet light. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. 36, : 10 (2018).
Boewering, Norbert, and Meier, Christian. “In situ transformation and cleaning of tin-drop contamination on mirrors for extreme ultraviolet light”. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 36.2 (2018): 10.