Metal oxide/silicon oxide multilayer with smooth interfaces produced by in situ controlled plasma-enhanced MOCVD
Hamelmann F, Haindl G, Schmalhorst J-M, Aschentrup A, Majkova E, Kleineberg U, Heinzmann U, Klipp A, Jutzi P, Anopchenko A, Jergel M, et al. (2000)
THIN SOLID FILMS 358(1-2): 90-93.
Zeitschriftenaufsatz
| Veröffentlicht | Englisch
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Autor*in
Hamelmann, FrankUniBi;
Haindl, G;
Schmalhorst, Jan-MichaelUniBi 
;
Aschentrup, A;
Majkova, E;
Kleineberg, U;
Heinzmann, UlrichUniBi;
Klipp, A;
Jutzi, PeterUniBi;
Anopchenko, A;
Jergel, M;
Luby, S
Alle
;
Aschentrup, A;
Majkova, E;
Kleineberg, U;
Heinzmann, UlrichUniBi;
Klipp, A;
Jutzi, PeterUniBi;
Anopchenko, A;
Jergel, M;
Luby, S
Alle
Einrichtung
Abstract / Bemerkung
Molybdenum oxide/silicon oxide and tungsten oxide/silicon oxide: multilayer with 24 periods and a period thickness of 9.2 nm were fabricated with plasma-enhanced MOCVD. The layer thickness was controlled by an in situ soft X-ray reflectivity measurement. For the deposition of the SiO2 layers, a new silicon organic precursor, pentamethylcyclopentadienyldisilane (Me5C5Si2H5) was used in an O-2 remote: plasma process. The high quality of multilayer interfaces was observed by cross-section transmission electron microscopy (TEM), the interface toughness was measured by hard X-ray reflectivity and diffuse scattering at grazing incidence experiments to be about 0.1 nm. Auger electron spectroscopy (AES) gives the information, that the silicon oxide is practically carbon free, and the carbon content of the metal oxides is low (<5%). (C) 2000 Elsevier Science S.A. All rights reserved.
Stichworte
multilayers;
oxides;
plasma processing and deposition
Erscheinungsjahr
2000
Zeitschriftentitel
THIN SOLID FILMS
Band
358
Ausgabe
1-2
Seite(n)
90-93
ISSN
0040-6090
Page URI
https://pub.uni-bielefeld.de/record/1620849
Zitieren
Hamelmann F, Haindl G, Schmalhorst J-M, et al. Metal oxide/silicon oxide multilayer with smooth interfaces produced by in situ controlled plasma-enhanced MOCVD. THIN SOLID FILMS. 2000;358(1-2):90-93.
Hamelmann, F., Haindl, G., Schmalhorst, J. - M., Aschentrup, A., Majkova, E., Kleineberg, U., Heinzmann, U., et al. (2000). Metal oxide/silicon oxide multilayer with smooth interfaces produced by in situ controlled plasma-enhanced MOCVD. THIN SOLID FILMS, 358(1-2), 90-93. https://doi.org/10.1016/S0040-6090(99)00695-1
Hamelmann, Frank, Haindl, G, Schmalhorst, Jan-Michael, Aschentrup, A, Majkova, E, Kleineberg, U, Heinzmann, Ulrich, et al. 2000. “Metal oxide/silicon oxide multilayer with smooth interfaces produced by in situ controlled plasma-enhanced MOCVD”. THIN SOLID FILMS 358 (1-2): 90-93.
Hamelmann, F., Haindl, G., Schmalhorst, J. - M., Aschentrup, A., Majkova, E., Kleineberg, U., Heinzmann, U., Klipp, A., Jutzi, P., Anopchenko, A., et al. (2000). Metal oxide/silicon oxide multilayer with smooth interfaces produced by in situ controlled plasma-enhanced MOCVD. THIN SOLID FILMS 358, 90-93.
Hamelmann, F., et al., 2000. Metal oxide/silicon oxide multilayer with smooth interfaces produced by in situ controlled plasma-enhanced MOCVD. THIN SOLID FILMS, 358(1-2), p 90-93.
F. Hamelmann, et al., “Metal oxide/silicon oxide multilayer with smooth interfaces produced by in situ controlled plasma-enhanced MOCVD”, THIN SOLID FILMS, vol. 358, 2000, pp. 90-93.
Hamelmann, F., Haindl, G., Schmalhorst, J.-M., Aschentrup, A., Majkova, E., Kleineberg, U., Heinzmann, U., Klipp, A., Jutzi, P., Anopchenko, A., Jergel, M., Luby, S.: Metal oxide/silicon oxide multilayer with smooth interfaces produced by in situ controlled plasma-enhanced MOCVD. THIN SOLID FILMS. 358, 90-93 (2000).
Hamelmann, Frank, Haindl, G, Schmalhorst, Jan-Michael, Aschentrup, A, Majkova, E, Kleineberg, U, Heinzmann, Ulrich, Klipp, A, Jutzi, Peter, Anopchenko, A, Jergel, M, and Luby, S. “Metal oxide/silicon oxide multilayer with smooth interfaces produced by in situ controlled plasma-enhanced MOCVD”. THIN SOLID FILMS 358.1-2 (2000): 90-93.
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