Please note that PUB no longer supports Internet Explorer versions 8 or 9 (or earlier).

We recommend upgrading to the latest Internet Explorer, Google Chrome, or Firefox.

55 Publikationen

2007 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1593514
Actinic inspection of EUVL mask blank defects by photoemission electron microscopy: Effect of inspection wavelength variation
Lin, Jingquan, Actinic inspection of EUVL mask blank defects by photoemission electron microscopy: Effect of inspection wavelength variation. 84 (5-8). , 2007
PUB | DOI | WoS
 
2007 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1595083
Attosecond real-time observation of electron tunnelling in atoms
Uiberacker, M., Attosecond real-time observation of electron tunnelling in atoms. Nature 446 (7136). , 2007
PUB | DOI | WoS | PubMed | Europe PMC
 
2007 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1631830
Attosecond spectroscopy in condensed matter
Cavalieri, A. L., Attosecond spectroscopy in condensed matter. Nature 449 (7165). , 2007
PUB | DOI | WoS | PubMed | Europe PMC
 
2007 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1631440
Phase defect inspection of multilayer masks for 13.5 nm optical lithography using PEEM in a standing wave mode
Maul, J., Phase defect inspection of multilayer masks for 13.5 nm optical lithography using PEEM in a standing wave mode. 601 (20). , 2007
PUB | DOI | WoS
 
2006 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1596280
Actinic extreme ultraviolet lithography mask blank defect inspection by photoemission electron microscopy
Lin, Jingquan, Actinic extreme ultraviolet lithography mask blank defect inspection by photoemission electron microscopy. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 24 (6). , 2006
PUB | DOI | WoS
 
2006 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1597153
Interference of spin states in resonant photoemission induced by circularly polarized light from magnetized Gd
Müller, Norbert, Interference of spin states in resonant photoemission induced by circularly polarized light from magnetized Gd. PHYSICAL REVIEW B 74 (16). , 2006
PUB | DOI | WoS
 
2006 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1599271
A new approach for actinic defect inspection of EUVL multilayer mask blanks: Standing wave photoemission electron microscopy
Neuhäusler, U, A new approach for actinic defect inspection of EUVL multilayer mask blanks: Standing wave photoemission electron microscopy. 83 (4-9). , 2006
PUB | DOI | WoS
 
2006 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1600433
High-resolution actinic defect inspection for extreme ultraviolet lithography multilayer mask blanks by photoemission electron microscopy
Neuhäusler, U, High-resolution actinic defect inspection for extreme ultraviolet lithography multilayer mask blanks by photoemission electron microscopy. APPLIED PHYSICS LETTERS 88 (5). , 2006
PUB | DOI | WoS
 
2006 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1601030
Plasma-assisted chemical vapor deposited silicon oxynitride as an alternative material for gate dielectric in MOS devices
Szekeres, A, Plasma-assisted chemical vapor deposited silicon oxynitride as an alternative material for gate dielectric in MOS devices. MICROELECTRONICS JOURNAL 37 (1). , 2006
PUB | DOI | WoS
 
2006 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1599019
Design, fabrication, and analysis of chirped multilayer mirrors for reflection of extreme-ultraviolet attosecond pulses
Wonisch, A, Design, fabrication, and analysis of chirped multilayer mirrors for reflection of extreme-ultraviolet attosecond pulses. APPLIED OPTICS 45 (17). , 2006
PUB | DOI | WoS | PubMed | Europe PMC
 
2005 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1874437
Technology and characterization of CVD-grown mixed Mo/W oxide films and electrochromic devices made on their basis
Gesheva, K., Technology and characterization of CVD-grown mixed Mo/W oxide films and electrochromic devices made on their basis. ECS Proceedings PV 2005-09 (). , 2005
PUB
 
2005 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1604367
Electrical properties of plasma-assisted CVD deposited thin silicon oxynitride films
Szekeres, A, Electrical properties of plasma-assisted CVD deposited thin silicon oxynitride films. 7 (1). , 2005
PUB | WoS
 
2005 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1605048
Attosecond metrology with controlled light waveforms
Uiberacker, M, Attosecond metrology with controlled light waveforms. LASER PHYSICS 15 (1). , 2005
PUB | WoS
 
2005 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1605264
Toward time-resolved soft X-ray microscopy using pulsed fs-high-harmonic radiation
Wieland, M, Toward time-resolved soft X-ray microscopy using pulsed fs-high-harmonic radiation. ULTRAMICROSCOPY 102 (2). , 2005
PUB | DOI | WoS | PubMed | Europe PMC
 
2005 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1604354
Deposition of silicon oxide thin films in TEOS with addition of oxygen to the plasma ambient: IR spectra analysis
Hamelmann, Frank, Deposition of silicon oxide thin films in TEOS with addition of oxygen to the plasma ambient: IR spectra analysis. 7 (1). , 2005
PUB | WoS
 
2005 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1604360
Optical and electrochromic characterization of multilayered mixed metal oxide thin films
Hamelmann, Frank, Optical and electrochromic characterization of multilayered mixed metal oxide thin films. 7 (1). , 2005
PUB | WoS
 
2004 | Sammelwerksbeitrag | Veröffentlicht | PUB-ID: 1876589
Time-resolved inner-shell spectroscopy with sub-fs EUV pulses
Drescher, Markus, Time-resolved inner-shell spectroscopy with sub-fs EUV pulses. Ultrafast Optics IV 95 (). New York, 2004
PUB | DOI
 
2004 | Sammelwerksbeitrag | Veröffentlicht | PUB-ID: 1876611
Multilayer EUV Optics for Applications of Ultrashort High Harmonic Pulses
Westerwalbesloh, Thomas, Multilayer EUV Optics for Applications of Ultrashort High Harmonic Pulses. Ultrafast Optics IV 95 (). New York, 2004
PUB | DOI
 
2004 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1875279
Time-resolved electron spectroscopy of atomic inner-shell dynamics
Drescher, Markus, Time-resolved electron spectroscopy of atomic inner-shell dynamics. J. Electr. Spectr. 137-140 137-140 (). , 2004
PUB | DOI | WoS
 
2004 | Sammelwerksbeitrag | Veröffentlicht | PUB-ID: 1876575
Application of high-harmonic radiation for EUV interferometry and spectroscopy
Wieland, M., Application of high-harmonic radiation for EUV interferometry and spectroscopy. Ultrafast Optics IV 95 (). New York, 2004
PUB | DOI
 

Filter und Suchbegriffe

department=33079537

Suche

Publikationen filtern

Darstellung / Sortierung

Zitationsstil: default

Export / Einbettung