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55 Publikationen

2007 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1593514
Lin, Jingquan, Neuhaeusler, U., Slieh, J., Brechling, Armin, Heinzmann, Ulrich, Weber, N., Escher, M., et al. 2007. “Actinic inspection of EUVL mask blank defects by photoemission electron microscopy: Effect of inspection wavelength variation”, MICROELECTRONIC ENGINEERING, 84 (5-8): 1011-1014.
PUB | DOI | WoS
 
2007 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1595083
Uiberacker, M., Uphues, Thorsten, Schultze, M., Verhoef, A. J., Yakovlev, V., Kling, M. F., Rauschenberger, J., et al. 2007. “Attosecond real-time observation of electron tunnelling in atoms”. Nature 446 (7136): 627-632.
PUB | DOI | WoS | PubMed | Europe PMC
 
2007 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1631830
Cavalieri, A. L., Müller, Norbert, Uphues, Thorsten, Yakovlev, V. S., Baltuska, A., Horvath, B., Schmidt, B., et al. 2007. “Attosecond spectroscopy in condensed matter”. Nature 449 (7165): 1029-1032.
PUB | DOI | WoS | PubMed | Europe PMC
 
2007 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1631440
Maul, J., Lin, J., Oelsner, A., Valdaitsev, D., Weber, N., Escher, M., Merkel, M., et al. 2007. “Phase defect inspection of multilayer masks for 13.5 nm optical lithography using PEEM in a standing wave mode”, SURFACE SCIENCE, 601 (20): 4758-4763.
PUB | DOI | WoS
 
2006 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1596280
Lin, Jingquan, Neuhaeusler, Ulrich, Slieh, Jawad, Brechling, Armin, Kleineberg, Ulf, Heinzmann, Ulrich, Oelsner, Andreas, et al. 2006. “Actinic extreme ultraviolet lithography mask blank defect inspection by photoemission electron microscopy”. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 24 (6): 2631-2635.
PUB | DOI | WoS
 
2006 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1597153
Müller, Norbert, Khalil, T., Pohl, M., Uphues, T., Polcik, M., Rader, O., Heigl, F., et al. 2006. “Interference of spin states in resonant photoemission induced by circularly polarized light from magnetized Gd”. PHYSICAL REVIEW B 74 (16): 161401.
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2006 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1599271
Neuhäusler, U, Lin, J, Oelsner, A, Schicketanz, M, Valdaitsev, D, Slieh, J, Weber, N, et al. 2006. “A new approach for actinic defect inspection of EUVL multilayer mask blanks: Standing wave photoemission electron microscopy”, MICROELECTRONIC ENGINEERING, 83 (4-9): 680-683.
PUB | DOI | WoS
 
2006 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1600433
Neuhäusler, U, Oelsner, A, Slieh, J, Brzeska, M, Wonisch, A, Westerwalbesloh, T, Brückl, Hubert, et al. 2006. “High-resolution actinic defect inspection for extreme ultraviolet lithography multilayer mask blanks by photoemission electron microscopy”. APPLIED PHYSICS LETTERS 88 (5): 053113.
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2006 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1601030
Szekeres, A, Nikolova, T, Simeonov, S, Gushterov, A, Hamelmann, Frank, and Heinzmann, Ulrich. 2006. “Plasma-assisted chemical vapor deposited silicon oxynitride as an alternative material for gate dielectric in MOS devices”. MICROELECTRONICS JOURNAL 37 (1): 64-70.
PUB | DOI | WoS
 
2006 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1599019
Wonisch, A, Neuhäusler, U, Kabachnik, Nikolay M., Uphues, T, Uiberacker, M, Yakovlev, V, Krausz, F, Drescher, Markus, Kleineberg, U, and Heinzmann, Ulrich. 2006. “Design, fabrication, and analysis of chirped multilayer mirrors for reflection of extreme-ultraviolet attosecond pulses”. APPLIED OPTICS 45 (17): 4147-4156.
PUB | DOI | WoS | PubMed | Europe PMC
 
2005 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1874437
Gesheva, K., Ivanova, T., Steinman, E., Hamelmann, Frank, Heinzmann, Ulrich, and Brechling, Armin. 2005. “Technology and characterization of CVD-grown mixed Mo/W oxide films and electrochromic devices made on their basis”. In ECS Proceedings PV 2005-09, 799-799.
PUB
 
2005 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1604367
Szekeres, A, Simeonov, S, Gushterov, A, Nikolova, T, Hamelmann, Frank, and Heinzmann, Ulrich. 2005. “Electrical properties of plasma-assisted CVD deposited thin silicon oxynitride films”, JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 7 (1): 553-556.
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2005 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1605048
Uiberacker, M, Goulielmakis, E, Kienberger, R, Baltuska, A, Westerwalbesloh, T, Keineberg, U, Heinzmann, Ulrich, Drescher, Markus, and Krausz, F. 2005. “Attosecond metrology with controlled light waveforms”. LASER PHYSICS 15 (1): 195-204.
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2005 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1605264
Wieland, M, Spielmann, C, Kleineberg, U, Westerwalbesloh, T, Heinzmann, Ulrich, and Wilhein, T. 2005. “Toward time-resolved soft X-ray microscopy using pulsed fs-high-harmonic radiation”. ULTRAMICROSCOPY 102 (2): 93-100.
PUB | DOI | WoS | PubMed | Europe PMC
 
2005 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1604354
Hamelmann, Frank, Heinzmann, Ulrich, Szekeres, A, Kirov, N, and Nikolova, T. 2005. “Deposition of silicon oxide thin films in TEOS with addition of oxygen to the plasma ambient: IR spectra analysis”, JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 7 (1): 389-392.
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2005 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1604360
Hamelmann, Frank, Gesheva, K, Ivanova, T, Szekeres, A, Abrashev, M, and Heinzmann, Ulrich. 2005. “Optical and electrochromic characterization of multilayered mixed metal oxide thin films”, JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 7 (1): 393-396.
PUB | WoS
 
2004 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1875279
Drescher, Markus, Hentschel, M., Kienberger, P., Uiberacker, M., Westerwalbesloh, Thomas, Kleineberg, Ulf, Krausz, F., and Heinzmann, Ulrich. 2004. “Time-resolved electron spectroscopy of atomic inner-shell dynamics”. J. Electr. Spectr. 137-140 137-140: 259-264.
PUB | DOI | WoS
 
2004 | Sammelwerksbeitrag | Veröffentlicht | PUB-ID: 1876575
Wieland, M., Spielmann, Ch., Kleineberg, Ulf, Heinzmann, Ulrich, and Wilhein, T. 2004. “Application of high-harmonic radiation for EUV interferometry and spectroscopy”. In Ultrafast Optics IV, ed. Ferenc Krausz, Georg Korn, Paul Corkum, and Ian A. Walmsley, 95:467-467. Springer Series in OPTICAL SCIENCES. New York: Springer.
PUB | DOI
 
2004 | Sammelwerksbeitrag | Veröffentlicht | PUB-ID: 1876589
Drescher, Markus, Hentschel, M., Kienberger, R., Uiberacker, M., Yakovlev, V., Scrinzi, A., Westerwalbesloh, Thomas, Kleineberg, Ulf, Heinzmann, Ulrich, and Krausz, F. 2004. “Time-resolved inner-shell spectroscopy with sub-fs EUV pulses”. In Ultrafast Optics IV, ed. Ferenc Krausz, Georg Korn, Paul Corkum, and Ian A. Walmsley. Vol. 95. Springer Series in OPTICAL SCIENCES. New York: Springer.
PUB | DOI
 
2004 | Sammelwerksbeitrag | Veröffentlicht | PUB-ID: 1876611
Westerwalbesloh, Thomas, Kleineberg, Ulf, Lim, Y.C., Siffalovic, Peter, Drescher, Markus, and Heinzmann, Ulrich. 2004. “Multilayer EUV Optics for Applications of Ultrashort High Harmonic Pulses”. In Ultrafast Optics IV, ed. Ferenc Krausz, Georg Korn, Paul Corkum, and Ian A. Walmsley. Vol. 95. Springer Series in OPTICAL SCIENCES. New York: Springer.
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