Please note that PUB no longer supports Internet Explorer versions 8 or 9 (or earlier).

We recommend upgrading to the latest Internet Explorer, Google Chrome, or Firefox.

55 Publikationen

2007 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1593514
Lin J, Neuhaeusler U, Slieh J, et al. Actinic inspection of EUVL mask blank defects by photoemission electron microscopy: Effect of inspection wavelength variation. MICROELECTRONIC ENGINEERING. 2007;84(5-8):1011-1014.
PUB | DOI | WoS
 
2007 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1595083
Uiberacker M, Uphues T, Schultze M, et al. Attosecond real-time observation of electron tunnelling in atoms. Nature. 2007;446(7136):627-632.
PUB | DOI | WoS | PubMed | Europe PMC
 
2007 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1631830
Cavalieri AL, Müller N, Uphues T, et al. Attosecond spectroscopy in condensed matter. Nature. 2007;449(7165):1029-1032.
PUB | DOI | WoS | PubMed | Europe PMC
 
2007 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1631440
Maul J, Lin J, Oelsner A, et al. Phase defect inspection of multilayer masks for 13.5 nm optical lithography using PEEM in a standing wave mode. SURFACE SCIENCE. 2007;601(20):4758-4763.
PUB | DOI | WoS
 
2006 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1596280
Lin J, Neuhaeusler U, Slieh J, et al. Actinic extreme ultraviolet lithography mask blank defect inspection by photoemission electron microscopy. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. 2006;24(6):2631-2635.
PUB | DOI | WoS
 
2006 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1597153
Müller N, Khalil T, Pohl M, et al. Interference of spin states in resonant photoemission induced by circularly polarized light from magnetized Gd. PHYSICAL REVIEW B. 2006;74(16): 161401.
PUB | DOI | WoS
 
2006 | Konferenzbeitrag | Veröffentlicht | PUB-ID: 1599271
Neuhäusler U, Lin J, Oelsner A, et al. A new approach for actinic defect inspection of EUVL multilayer mask blanks: Standing wave photoemission electron microscopy. MICROELECTRONIC ENGINEERING. 2006;83(4-9):680-683.
PUB | DOI | WoS
 
2006 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1600433
Neuhäusler U, Oelsner A, Slieh J, et al. High-resolution actinic defect inspection for extreme ultraviolet lithography multilayer mask blanks by photoemission electron microscopy. APPLIED PHYSICS LETTERS. 2006;88(5): 053113.
PUB | DOI | WoS
 
2006 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1599019
Wonisch A, Neuhäusler U, Kabachnik NM, et al. Design, fabrication, and analysis of chirped multilayer mirrors for reflection of extreme-ultraviolet attosecond pulses. APPLIED OPTICS. 2006;45(17):4147-4156.
PUB | DOI | WoS | PubMed | Europe PMC
 
2006 | Zeitschriftenaufsatz | Veröffentlicht | PUB-ID: 1601030
Szekeres A, Nikolova T, Simeonov S, Gushterov A, Hamelmann F, Heinzmann U. Plasma-assisted chemical vapor deposited silicon oxynitride as an alternative material for gate dielectric in MOS devices. MICROELECTRONICS JOURNAL. 2006;37(1):64-70.
PUB | DOI | WoS
 

Filter und Suchbegriffe

department=33079537

Suche

Publikationen filtern

Darstellung / Sortierung

Zitationsstil: ama

Export / Einbettung