Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID)

Shih P-Y (2022)
Bielefeld: Universität Bielefeld.

Bielefelder E-Dissertation | Englisch
 
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Autor*in
Shih, Po-Yuan
Gutachter*in / Betreuer*in
Jahr
2022
Seite(n)
185
Page URI
https://pub.uni-bielefeld.de/record/2962553

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Shih P-Y. Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID). Bielefeld: Universität Bielefeld; 2022.
Shih, P. - Y. (2022). Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID). Bielefeld: Universität Bielefeld. https://doi.org/10.4119/unibi/2962553
Shih, Po-Yuan. 2022. Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID). Bielefeld: Universität Bielefeld.
Shih, P. - Y. (2022). Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID). Bielefeld: Universität Bielefeld.
Shih, P.-Y., 2022. Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID), Bielefeld: Universität Bielefeld.
P.-Y. Shih, Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID), Bielefeld: Universität Bielefeld, 2022.
Shih, P.-Y.: Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID). Universität Bielefeld, Bielefeld (2022).
Shih, Po-Yuan. Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID). Bielefeld: Universität Bielefeld, 2022.
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