Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID)

Shih, Po-Yuan

Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID)

Shih P-Y (2022)
Bielefeld: Universität Bielefeld.

Bielefelder E-Dissertation | Englisch

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Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID).pdf 3.88 MB

DOI

https://doi.org/10.4119/unibi/2962553

URN

urn:nbn:de:0070-pub-29625536

Autor*in

Shih, Po-Yuan

Gutachter*in / Betreuer*in

Gölzhäuser, Armin^UniBi ; Hütten, Andreas^UniBi

Einrichtung

Fakultät für Physik

Jahr

2022

Seite(n)

185

Urheberrecht / Lizenzen

Creative Commons Namensnennung 4.0 International Public License (CC-BY 4.0)

Page URI

https://pub.uni-bielefeld.de/record/2962553

Zitieren

Shih P-Y. Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID). Bielefeld: Universität Bielefeld; 2022.

Shih, P. - Y. (2022). Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID). Bielefeld: Universität Bielefeld. https://doi.org/10.4119/unibi/2962553

Shih, Po-Yuan. 2022. Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID). Bielefeld: Universität Bielefeld.

Shih, P. - Y. (2022). Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID). Bielefeld: Universität Bielefeld.

Shih, P.-Y., 2022. Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID), Bielefeld: Universität Bielefeld.

P.-Y. Shih, Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID), Bielefeld: Universität Bielefeld, 2022.

Shih, P.-Y.: Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID). Universität Bielefeld, Bielefeld (2022).

Shih, Po-Yuan. Relating mask repair performance to physical and chemical aspects of focused electron beam induced deposition (FEBID). Bielefeld: Universität Bielefeld, 2022.

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