Scanning transmission helium ion microscopy on carbon nanomembranes

Emmrich D, Wolff A, Meyerbroker N, Lindner JKN, Beyer A, Gölzhäuser A (2021)
Beilstein journal of nanotechnology 12: 222–231.

Zeitschriftenaufsatz | Veröffentlicht | Englisch
 
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Autor*in
Emmrich, DanielUniBi; Wolff, Annalena; Meyerbroker, Nikolaus; Lindner, Jorg K N; Beyer, AndréUniBi ; Gölzhäuser, ArminUniBi
Abstract / Bemerkung
A dark-field scanning transmission ion microscopy detector was designed for the helium ion microscope. The detection principle is based on a secondary electron conversion holder with an exchangeable aperture strip allowing its acceptance angle to be tuned from 3 to 98 mrad. The contrast mechanism and performance were investigated using freestanding nanometer-thin carbon membranes. The results demonstrate that the detector can be optimized either for most efficient signal collection or for maximum image contrast. The designed setup allows for the imaging of thin low-density materials that otherwise provide little signal or contrast and for a clear end-point detection in the fabrication of nanopores. In addition, the detector is able to determine the thickness of membranes with sub-nanometer precision by quantitatively evaluating the image signal and comparing the results with Monte Carlo simulations. The thickness determined by the dark-field transmission detector is compared to X-ray photoelectron spectroscopy and energy-filtered transmission electron microscopy measurements. Copyright © 2021, Emmrich et al.
Erscheinungsjahr
2021
Zeitschriftentitel
Beilstein journal of nanotechnology
Band
12
Seite(n)
222–231
eISSN
2190-4286
Page URI
https://pub.uni-bielefeld.de/record/2953009

Zitieren

Emmrich D, Wolff A, Meyerbroker N, Lindner JKN, Beyer A, Gölzhäuser A. Scanning transmission helium ion microscopy on carbon nanomembranes. Beilstein journal of nanotechnology. 2021;12:222–231.
Emmrich, D., Wolff, A., Meyerbroker, N., Lindner, J. K. N., Beyer, A., & Gölzhäuser, A. (2021). Scanning transmission helium ion microscopy on carbon nanomembranes. Beilstein journal of nanotechnology, 12, 222–231. https://doi.org/10.3762/bjnano.12.18
Emmrich, D., Wolff, A., Meyerbroker, N., Lindner, J. K. N., Beyer, A., and Gölzhäuser, A. (2021). Scanning transmission helium ion microscopy on carbon nanomembranes. Beilstein journal of nanotechnology 12, 222–231.
Emmrich, D., et al., 2021. Scanning transmission helium ion microscopy on carbon nanomembranes. Beilstein journal of nanotechnology, 12, p 222–231.
D. Emmrich, et al., “Scanning transmission helium ion microscopy on carbon nanomembranes”, Beilstein journal of nanotechnology, vol. 12, 2021, pp. 222–231.
Emmrich, D., Wolff, A., Meyerbroker, N., Lindner, J.K.N., Beyer, A., Gölzhäuser, A.: Scanning transmission helium ion microscopy on carbon nanomembranes. Beilstein journal of nanotechnology. 12, 222–231 (2021).
Emmrich, Daniel, Wolff, Annalena, Meyerbroker, Nikolaus, Lindner, Jorg K N, Beyer, André, and Gölzhäuser, Armin. “Scanning transmission helium ion microscopy on carbon nanomembranes”. Beilstein journal of nanotechnology 12 (2021): 222–231.

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