Induction of tin pest for cleaning tin-drop contaminated optics

Boewering N (2017)
MATERIALS CHEMISTRY AND PHYSICS 198: 236-242.

Zeitschriftenaufsatz | Veröffentlicht | Englisch
 
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Abstract / Bemerkung
Tin pest, the allotropic beta -> alpha a phase transformation of tin, was examined for use in cleaning of tin contaminated optics. Induction of change in material structure led to disintegration of tin samples into pieces and powder. The transition times were studied for tin drops of different purity grades, using inoculation with alpha-Sn seed particles, also after prior mechanical deformation and surface oxide removal. For tin of very high purity levels fast nucleation within hours and full transformation within a day could be achieved during cooling at 24 degrees C, resulting in strong embrittlement of the material. Tin dripped onto samples of multilayer-coated optics as used in extreme ultraviolet lithography machines was made cleanable by phase transition after inoculation and cooling. The reflectance of multilayer-coated mirrors was found to decrease by no more than 1% with this cleaning method. (C) 2017 Elsevier B.V. All rights reserved.
Stichworte
Phase transitions; Structural changes; Multilayer coating; Optics; cleaning; Extreme ultraviolet lithography
Erscheinungsjahr
2017
Zeitschriftentitel
MATERIALS CHEMISTRY AND PHYSICS
Band
198
Seite(n)
236-242
ISSN
0254-0584
eISSN
1879-3312
Page URI
https://pub.uni-bielefeld.de/record/2916488

Zitieren

Boewering N. Induction of tin pest for cleaning tin-drop contaminated optics. MATERIALS CHEMISTRY AND PHYSICS. 2017;198:236-242.
Boewering, N. (2017). Induction of tin pest for cleaning tin-drop contaminated optics. MATERIALS CHEMISTRY AND PHYSICS, 198, 236-242. doi:10.1016/j.matchemphys.2017.06.011
Boewering, N. (2017). Induction of tin pest for cleaning tin-drop contaminated optics. MATERIALS CHEMISTRY AND PHYSICS 198, 236-242.
Boewering, N., 2017. Induction of tin pest for cleaning tin-drop contaminated optics. MATERIALS CHEMISTRY AND PHYSICS, 198, p 236-242.
N. Boewering, “Induction of tin pest for cleaning tin-drop contaminated optics”, MATERIALS CHEMISTRY AND PHYSICS, vol. 198, 2017, pp. 236-242.
Boewering, N.: Induction of tin pest for cleaning tin-drop contaminated optics. MATERIALS CHEMISTRY AND PHYSICS. 198, 236-242 (2017).
Boewering, Norbert. “Induction of tin pest for cleaning tin-drop contaminated optics”. MATERIALS CHEMISTRY AND PHYSICS 198 (2017): 236-242.