Nanopore fabrication and characterization by helium ion microscopy

Emmrich D, Beyer A, Nadzeyka A, Bauerdick S, Meyer JC, Kotakoski J, Gölzhäuser A (2016)
APPLIED PHYSICS LETTERS 108(16): 163103.

Zeitschriftenaufsatz | Veröffentlicht | Englisch
 
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Abstract / Bemerkung
The Helium Ion Microscope (HIM) has the capability to image small features with a resolution down to 0.35 nm due to its highly focused gas field ionization source and its small beam-sample interaction volume. In this work, the focused helium ion beam of a HIM is utilized to create nanopores with diameters down to 1.3 nm. It will be demonstrated that nanopores can be milled into silicon nitride, carbon nanomembranes, and graphene with well-defined aspect ratio. To image and characterize the produced nanopores, helium ion microscopy and high resolution scanning transmission electron microscopy were used. The analysis of the nanopores' growth behavior allows inferring on the profile of the helium ion beam. Published by AIP Publishing.
Erscheinungsjahr
2016
Zeitschriftentitel
APPLIED PHYSICS LETTERS
Band
108
Ausgabe
16
Art.-Nr.
163103
ISSN
0003-6951
eISSN
1077-3118
Page URI
https://pub.uni-bielefeld.de/record/2904108

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Emmrich D, Beyer A, Nadzeyka A, et al. Nanopore fabrication and characterization by helium ion microscopy. APPLIED PHYSICS LETTERS. 2016;108(16): 163103.
Emmrich, D., Beyer, A., Nadzeyka, A., Bauerdick, S., Meyer, J. C., Kotakoski, J., & Gölzhäuser, A. (2016). Nanopore fabrication and characterization by helium ion microscopy. APPLIED PHYSICS LETTERS, 108(16), 163103. doi:10.1063/1.4947277
Emmrich, D., Beyer, A., Nadzeyka, A., Bauerdick, S., Meyer, J. C., Kotakoski, J., and Gölzhäuser, A. (2016). Nanopore fabrication and characterization by helium ion microscopy. APPLIED PHYSICS LETTERS 108:163103.
Emmrich, D., et al., 2016. Nanopore fabrication and characterization by helium ion microscopy. APPLIED PHYSICS LETTERS, 108(16): 163103.
D. Emmrich, et al., “Nanopore fabrication and characterization by helium ion microscopy”, APPLIED PHYSICS LETTERS, vol. 108, 2016, : 163103.
Emmrich, D., Beyer, A., Nadzeyka, A., Bauerdick, S., Meyer, J.C., Kotakoski, J., Gölzhäuser, A.: Nanopore fabrication and characterization by helium ion microscopy. APPLIED PHYSICS LETTERS. 108, : 163103 (2016).
Emmrich, Daniel, Beyer, André, Nadzeyka, A., Bauerdick, S., Meyer, J. C., Kotakoski, J., and Gölzhäuser, Armin. “Nanopore fabrication and characterization by helium ion microscopy”. APPLIED PHYSICS LETTERS 108.16 (2016): 163103.