Design of a compact ultrahigh vaccum-compatible setup for the analysis of chemical vapor deposition processes

Weiss, Theodor; Nowak, Martin; Mundloch, Udo; Zielasek, Volkmar; Kohse-Höinghaus, Katharina; Bäumer, Marcus

Design of a compact ultrahigh vaccum-compatible setup for the analysis of chemical vapor deposition processes

Weiss T, Nowak M, Mundloch U, Zielasek V, Kohse-Höinghaus K, Bäumer M (2014)
REVIEW OF SCIENTIFIC INSTRUMENTS 85(10): 104104.

Zeitschriftenaufsatz | Veröffentlicht | Englisch

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DOI

https://doi.org/10.1063/1.4897620

Autor*in

Weiss, Theodor; Nowak, Martin; Mundloch, Udo; Zielasek, Volkmar; Kohse-Höinghaus, Katharina^UniBi; Bäumer, Marcus

Einrichtung

Fakultät für Chemie

Erscheinungsjahr

2014

Zeitschriftentitel

REVIEW OF SCIENTIFIC INSTRUMENTS

Band

85

Ausgabe

10

Art.-Nr.

104104

ISSN

0034-6748

eISSN

1089-7623

Page URI

https://pub.uni-bielefeld.de/record/2700144

Zitieren

Weiss T, Nowak M, Mundloch U, Zielasek V, Kohse-Höinghaus K, Bäumer M. Design of a compact ultrahigh vaccum-compatible setup for the analysis of chemical vapor deposition processes. REVIEW OF SCIENTIFIC INSTRUMENTS. 2014;85(10): 104104.

Weiss, T., Nowak, M., Mundloch, U., Zielasek, V., Kohse-Höinghaus, K., & Bäumer, M. (2014). Design of a compact ultrahigh vaccum-compatible setup for the analysis of chemical vapor deposition processes. REVIEW OF SCIENTIFIC INSTRUMENTS, 85(10), 104104. doi:10.1063/1.4897620

Weiss, Theodor, Nowak, Martin, Mundloch, Udo, Zielasek, Volkmar, Kohse-Höinghaus, Katharina, and Bäumer, Marcus. 2014. “Design of a compact ultrahigh vaccum-compatible setup for the analysis of chemical vapor deposition processes”. REVIEW OF SCIENTIFIC INSTRUMENTS 85 (10): 104104.

Weiss, T., Nowak, M., Mundloch, U., Zielasek, V., Kohse-Höinghaus, K., and Bäumer, M. (2014). Design of a compact ultrahigh vaccum-compatible setup for the analysis of chemical vapor deposition processes. REVIEW OF SCIENTIFIC INSTRUMENTS 85:104104.

Weiss, T., et al., 2014. Design of a compact ultrahigh vaccum-compatible setup for the analysis of chemical vapor deposition processes. REVIEW OF SCIENTIFIC INSTRUMENTS, 85(10): 104104.

T. Weiss, et al., “Design of a compact ultrahigh vaccum-compatible setup for the analysis of chemical vapor deposition processes”, REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 85, 2014, : 104104.

Weiss, T., Nowak, M., Mundloch, U., Zielasek, V., Kohse-Höinghaus, K., Bäumer, M.: Design of a compact ultrahigh vaccum-compatible setup for the analysis of chemical vapor deposition processes. REVIEW OF SCIENTIFIC INSTRUMENTS. 85, : 104104 (2014).

Weiss, Theodor, Nowak, Martin, Mundloch, Udo, Zielasek, Volkmar, Kohse-Höinghaus, Katharina, and Bäumer, Marcus. “Design of a compact ultrahigh vaccum-compatible setup for the analysis of chemical vapor deposition processes”. REVIEW OF SCIENTIFIC INSTRUMENTS 85.10 (2014): 104104.