Self-sensing atomic force microscopy cantilevers based on tunnel magnetoresistance sensors

Tavassolizadeh A, Meier T, Rott K, Reiss G, Quandt E, Hoelscher H, Meyners D (2013)
Applied Physics Letters 102(15): 153104.

Zeitschriftenaufsatz | Veröffentlicht | Englisch
 
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Autor*in
Tavassolizadeh, Ali; Meier, Tobias; Rott, KarstenUniBi; Reiss, GünterUniBi ; Quandt, Eckhard; Hoelscher, Hendrik; Meyners, Dirk
Abstract / Bemerkung
Here, we introduce self-sensing cantilevers for atomic force microscopy (AFM) based on tunnel magnetoresistance (TMR) sensors. These TMR sensors are integrated into the AFM cantilevers and consist of a magnetically stable layer and a sensing magnetostrictive CoFeB layer separated by a MgO tunneling barrier and can be as small as 10 mu m x 10 mu m. Their TMR values and resistance-area products are about 121% and 61 k Omega mu m(2), respectively. A comparison of AFM data simultaneously obtained with a self-sensing cantilever with a 37 mu m x 37 mu m large TMR sensor and the conventional optical beam deflection method revealed the same data quality. (C) 2013 AIP Publishing LLC [http://dx.doi.org/10.1063/1.4801315]
Erscheinungsjahr
2013
Zeitschriftentitel
Applied Physics Letters
Band
102
Ausgabe
15
Art.-Nr.
153104
ISSN
0003-6951
Page URI
https://pub.uni-bielefeld.de/record/2607321

Zitieren

Tavassolizadeh A, Meier T, Rott K, et al. Self-sensing atomic force microscopy cantilevers based on tunnel magnetoresistance sensors. Applied Physics Letters. 2013;102(15): 153104.
Tavassolizadeh, A., Meier, T., Rott, K., Reiss, G., Quandt, E., Hoelscher, H., & Meyners, D. (2013). Self-sensing atomic force microscopy cantilevers based on tunnel magnetoresistance sensors. Applied Physics Letters, 102(15), 153104. doi:10.1063/1.4801315
Tavassolizadeh, A., Meier, T., Rott, K., Reiss, G., Quandt, E., Hoelscher, H., and Meyners, D. (2013). Self-sensing atomic force microscopy cantilevers based on tunnel magnetoresistance sensors. Applied Physics Letters 102:153104.
Tavassolizadeh, A., et al., 2013. Self-sensing atomic force microscopy cantilevers based on tunnel magnetoresistance sensors. Applied Physics Letters, 102(15): 153104.
A. Tavassolizadeh, et al., “Self-sensing atomic force microscopy cantilevers based on tunnel magnetoresistance sensors”, Applied Physics Letters, vol. 102, 2013, : 153104.
Tavassolizadeh, A., Meier, T., Rott, K., Reiss, G., Quandt, E., Hoelscher, H., Meyners, D.: Self-sensing atomic force microscopy cantilevers based on tunnel magnetoresistance sensors. Applied Physics Letters. 102, : 153104 (2013).
Tavassolizadeh, Ali, Meier, Tobias, Rott, Karsten, Reiss, Günter, Quandt, Eckhard, Hoelscher, Hendrik, and Meyners, Dirk. “Self-sensing atomic force microscopy cantilevers based on tunnel magnetoresistance sensors”. Applied Physics Letters 102.15 (2013): 153104.

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