FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES
ARMANTROUT GA, Miller D, VINDELOV KE, BROWN TG (1979)
Journal of Vacuum Science and Technology 16(2): 212-215.
Zeitschriftenaufsatz
| Veröffentlicht | Englisch
Download
Es wurden keine Dateien hochgeladen. Nur Publikationsnachweis!
Autor*in
Erscheinungsjahr
1979
Zeitschriftentitel
Journal of Vacuum Science and Technology
Band
16
Ausgabe
2
Seite(n)
212-215
ISSN
0022-5355
Page URI
https://pub.uni-bielefeld.de/record/2328533
Zitieren
ARMANTROUT GA, Miller D, VINDELOV KE, BROWN TG. FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES. Journal of Vacuum Science and Technology. 1979;16(2):212-215.
ARMANTROUT, G. A., Miller, D., VINDELOV, K. E., & BROWN, T. G. (1979). FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES. Journal of Vacuum Science and Technology, 16(2), 212-215. doi:10.1116/1.569910
ARMANTROUT, G. A., Miller, D., VINDELOV, K. E., and BROWN, T. G. (1979). FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES. Journal of Vacuum Science and Technology 16, 212-215.
ARMANTROUT, G.A., et al., 1979. FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES. Journal of Vacuum Science and Technology, 16(2), p 212-215.
G.A. ARMANTROUT, et al., “FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES”, Journal of Vacuum Science and Technology, vol. 16, 1979, pp. 212-215.
ARMANTROUT, G.A., Miller, D., VINDELOV, K.E., BROWN, T.G.: FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES. Journal of Vacuum Science and Technology. 16, 212-215 (1979).
ARMANTROUT, GA, Miller, David, VINDELOV, KE, and BROWN, TG. “FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES”. Journal of Vacuum Science and Technology 16.2 (1979): 212-215.
Export
Markieren/ Markierung löschen
Markierte Publikationen
Google Scholar