FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES

ARMANTROUT GA, Miller D, VINDELOV KE, BROWN TG (1979)
Journal of Vacuum Science and Technology 16(2): 212-215.

Zeitschriftenaufsatz | Veröffentlicht| Englisch
 
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Autor*in
ARMANTROUT, GA; Miller, DavidUniBi; VINDELOV, KE; BROWN, TG
Erscheinungsjahr
1979
Zeitschriftentitel
Journal of Vacuum Science and Technology
Band
16
Ausgabe
2
Seite(n)
212-215
ISSN
0022-5355
Page URI
https://pub.uni-bielefeld.de/record/2328533

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ARMANTROUT GA, Miller D, VINDELOV KE, BROWN TG. FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES. Journal of Vacuum Science and Technology. 1979;16(2):212-215.
ARMANTROUT, G. A., Miller, D., VINDELOV, K. E., & BROWN, T. G. (1979). FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES. Journal of Vacuum Science and Technology, 16(2), 212-215. doi:10.1116/1.569910
ARMANTROUT, G. A., Miller, D., VINDELOV, K. E., and BROWN, T. G. (1979). FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES. Journal of Vacuum Science and Technology 16, 212-215.
ARMANTROUT, G.A., et al., 1979. FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES. Journal of Vacuum Science and Technology, 16(2), p 212-215.
G.A. ARMANTROUT, et al., “FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES”, Journal of Vacuum Science and Technology, vol. 16, 1979, pp. 212-215.
ARMANTROUT, G.A., Miller, D., VINDELOV, K.E., BROWN, T.G.: FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES. Journal of Vacuum Science and Technology. 16, 212-215 (1979).
ARMANTROUT, GA, Miller, David, VINDELOV, KE, and BROWN, TG. “FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES”. Journal of Vacuum Science and Technology 16.2 (1979): 212-215.