MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS

LETTS SA, Miller D, CORLEY RA, TILLOTSON TM, WITT LA (1985)
In: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films, 3(3). American Vacuum Society (AVS): 1277-1278.

Kurzbeitrag Konferenz / Poster | Veröffentlicht | Englisch
 
Download
Es wurden keine Dateien hochgeladen. Nur Publikationsnachweis!
Autor*in
LETTS, SA; Miller, DavidUniBi; CORLEY, RA; TILLOTSON, TM; WITT, LA
Erscheinungsjahr
1985
Titel des Konferenzbandes
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Band
3
Ausgabe
3
Seite(n)
1277-1278
ISSN
0734-2101
Page URI
https://pub.uni-bielefeld.de/record/2328521

Zitieren

LETTS SA, Miller D, CORLEY RA, TILLOTSON TM, WITT LA. MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS. In: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films. Vol 3. American Vacuum Society (AVS); 1985: 1277-1278.
LETTS, S. A., Miller, D., CORLEY, R. A., TILLOTSON, T. M., & WITT, L. A. (1985). MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films, 3, 1277-1278. American Vacuum Society (AVS). doi:10.1116/1.573084
LETTS, S. A., Miller, D., CORLEY, R. A., TILLOTSON, T. M., and WITT, L. A. (1985). “MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS” in Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films, vol. 3, (American Vacuum Society (AVS), 1277-1278.
LETTS, S.A., et al., 1985. MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS. In Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films. no.3 American Vacuum Society (AVS), pp. 1277-1278.
S.A. LETTS, et al., “MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS”, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films, vol. 3, American Vacuum Society (AVS), 1985, pp.1277-1278.
LETTS, S.A., Miller, D., CORLEY, R.A., TILLOTSON, T.M., WITT, L.A.: MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films. 3, p. 1277-1278. American Vacuum Society (AVS) (1985).
LETTS, SA, Miller, David, CORLEY, RA, TILLOTSON, TM, and WITT, LA. “MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS”. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. American Vacuum Society (AVS), 1985.Vol. 3. Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films. 1277-1278.

Export

Markieren/ Markierung löschen
Markierte Publikationen

Open Data PUB

Web of Science

Dieser Datensatz im Web of Science®

Suchen in

Google Scholar