MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS
LETTS SA, Miller D, CORLEY RA, TILLOTSON TM, WITT LA (1985)
In: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films, 3(3). American Vacuum Society (AVS): 1277-1278.
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Autor*in
LETTS, SA;
Miller, DavidUniBi;
CORLEY, RA;
TILLOTSON, TM;
WITT, LA
Erscheinungsjahr
1985
Titel des Konferenzbandes
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Serien- oder Zeitschriftentitel
Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films
Band
3
Ausgabe
3
Seite(n)
1277-1278
ISSN
0734-2101
Page URI
https://pub.uni-bielefeld.de/record/2328521
Zitieren
LETTS SA, Miller D, CORLEY RA, TILLOTSON TM, WITT LA. MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS. In: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films. Vol 3. American Vacuum Society (AVS); 1985: 1277-1278.
LETTS, S. A., Miller, D., CORLEY, R. A., TILLOTSON, T. M., & WITT, L. A. (1985). MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films, 3, 1277-1278. American Vacuum Society (AVS). https://doi.org/10.1116/1.573084
LETTS, SA, Miller, David, CORLEY, RA, TILLOTSON, TM, and WITT, LA. 1985. “MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS”. In Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 3:1277-1278. Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films. American Vacuum Society (AVS).
LETTS, S. A., Miller, D., CORLEY, R. A., TILLOTSON, T. M., and WITT, L. A. (1985). “MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS” in Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films, vol. 3, (American Vacuum Society (AVS), 1277-1278.
LETTS, S.A., et al., 1985. MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS. In Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films. no.3 American Vacuum Society (AVS), pp. 1277-1278.
S.A. LETTS, et al., “MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS”, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films, vol. 3, American Vacuum Society (AVS), 1985, pp.1277-1278.
LETTS, S.A., Miller, D., CORLEY, R.A., TILLOTSON, T.M., WITT, L.A.: MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films. 3, p. 1277-1278. American Vacuum Society (AVS) (1985).
LETTS, SA, Miller, David, CORLEY, RA, TILLOTSON, TM, and WITT, LA. “MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS”. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. American Vacuum Society (AVS), 1985.Vol. 3. Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films. 1277-1278.
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