Photolithographic fabrication of arbitrarily shaped SU-8 microparticles without sacrificial release layers

Bogunovic L, Anselmetti D, Regtmeier J (2011)
Journal of Micromechanics and Microengineering 21(2): 027003.

Zeitschriftenaufsatz | Veröffentlicht | Englisch
 
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Abstract / Bemerkung
We report on an efficient high throughput method for the photolithographic fabrication of well-defined arbitrarily shaped SU-8 microparticles without a sacrificial release layer. The procedure eliminates the spincoating of a sacrificial layer otherwise needed for particle lift-off, thereby reducing processing time and costs. Statistical analysis of the size distribution revealed a standard deviation of less than 2.3% in size. The particles can be immediately released into aqueous solution. This allows for anisotropical functionalization of the particles with, for example, biological loads or elements of molecular recognition after the development of the SU-8 structures.
Erscheinungsjahr
2011
Zeitschriftentitel
Journal of Micromechanics and Microengineering
Band
21
Ausgabe
2
Art.-Nr.
027003
ISSN
0960-1317
eISSN
1361-6439
Page URI
https://pub.uni-bielefeld.de/record/2003333

Zitieren

Bogunovic L, Anselmetti D, Regtmeier J. Photolithographic fabrication of arbitrarily shaped SU-8 microparticles without sacrificial release layers. Journal of Micromechanics and Microengineering. 2011;21(2): 027003.
Bogunovic, L., Anselmetti, D., & Regtmeier, J. (2011). Photolithographic fabrication of arbitrarily shaped SU-8 microparticles without sacrificial release layers. Journal of Micromechanics and Microengineering, 21(2), 027003. https://doi.org/10.1088/0960-1317/21/2/027003
Bogunovic, L., Anselmetti, D., and Regtmeier, J. (2011). Photolithographic fabrication of arbitrarily shaped SU-8 microparticles without sacrificial release layers. Journal of Micromechanics and Microengineering 21:027003.
Bogunovic, L., Anselmetti, D., & Regtmeier, J., 2011. Photolithographic fabrication of arbitrarily shaped SU-8 microparticles without sacrificial release layers. Journal of Micromechanics and Microengineering, 21(2): 027003.
L. Bogunovic, D. Anselmetti, and J. Regtmeier, “Photolithographic fabrication of arbitrarily shaped SU-8 microparticles without sacrificial release layers”, Journal of Micromechanics and Microengineering, vol. 21, 2011, : 027003.
Bogunovic, L., Anselmetti, D., Regtmeier, J.: Photolithographic fabrication of arbitrarily shaped SU-8 microparticles without sacrificial release layers. Journal of Micromechanics and Microengineering. 21, : 027003 (2011).
Bogunovic, Lukas, Anselmetti, Dario, and Regtmeier, Jan. “Photolithographic fabrication of arbitrarily shaped SU-8 microparticles without sacrificial release layers”. Journal of Micromechanics and Microengineering 21.2 (2011): 027003.

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