PUB - Publikationen an der Universität Bielefeld

We fabricated superconducting MgB2 thin films on (001) MgO substrates. Thesamples were prepared by magnetron rf and dc co-sputtering on heatedsubstrates. They were annealed ex-situ for one hour at temperatures between450{\deg}C and 750{\deg}C. We will show that the substrate temperature duringthe sputtering process and the post annealing temperatures play a crucial rolein forming MgB2 superconducting thin films. We achieved a critical onsettemperature of 27.1K for a film thickness of 30nm. The crystal structures weremeasured by x-ray diffraction.