Mass spectrometry as a basis for the selection of CVD precursors
Haase T, Bahlawane N, Strong JT, Jakob A, Shen Y, Lang H, Kohse-Höinghaus K (2005)
In: PROCEEDINGS OF EUROCVD-15. The Electrochemical Society: 276-283.
Konferenzbeitrag
| Veröffentlicht | Englisch
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Autor*in
Haase, Thomas;
Bahlawane, NaoufalUniBi 
;
Strong, J.T.;
Jakob, A.;
Shen, Y.;
Lang, H.;
Kohse-Höinghaus, KatharinaUniBi
;
Strong, J.T.;
Jakob, A.;
Shen, Y.;
Lang, H.;
Kohse-Höinghaus, KatharinaUniBiEinrichtung
Erscheinungsjahr
2005
Titel des Konferenzbandes
PROCEEDINGS OF EUROCVD-15
Seite(n)
276-283
Konferenz
EUROCVD
Konferenzort
Bochum, Germany
Konferenzdatum
2005-09-04
ISBN
1-56677-427-6
Page URI
https://pub.uni-bielefeld.de/record/1873036
Zitieren
Haase T, Bahlawane N, Strong JT, et al. Mass spectrometry as a basis for the selection of CVD precursors. In: PROCEEDINGS OF EUROCVD-15. The Electrochemical Society; 2005: 276-283.
Haase, T., Bahlawane, N., Strong, J. T., Jakob, A., Shen, Y., Lang, H., & Kohse-Höinghaus, K. (2005). Mass spectrometry as a basis for the selection of CVD precursors. PROCEEDINGS OF EUROCVD-15, 276-283. The Electrochemical Society.
Haase, Thomas, Bahlawane, Naoufal, Strong, J.T., Jakob, A., Shen, Y., Lang, H., and Kohse-Höinghaus, Katharina. 2005. “Mass spectrometry as a basis for the selection of CVD precursors”. In PROCEEDINGS OF EUROCVD-15, 276-283. The Electrochemical Society.
Haase, T., Bahlawane, N., Strong, J. T., Jakob, A., Shen, Y., Lang, H., and Kohse-Höinghaus, K. (2005). “Mass spectrometry as a basis for the selection of CVD precursors” in PROCEEDINGS OF EUROCVD-15 (The Electrochemical Society), 276-283.
Haase, T., et al., 2005. Mass spectrometry as a basis for the selection of CVD precursors. In PROCEEDINGS OF EUROCVD-15. The Electrochemical Society, pp. 276-283.
T. Haase, et al., “Mass spectrometry as a basis for the selection of CVD precursors”, PROCEEDINGS OF EUROCVD-15, The Electrochemical Society, 2005, pp.276-283.
Haase, T., Bahlawane, N., Strong, J.T., Jakob, A., Shen, Y., Lang, H., Kohse-Höinghaus, K.: Mass spectrometry as a basis for the selection of CVD precursors. PROCEEDINGS OF EUROCVD-15. p. 276-283. The Electrochemical Society (2005).
Haase, Thomas, Bahlawane, Naoufal, Strong, J.T., Jakob, A., Shen, Y., Lang, H., and Kohse-Höinghaus, Katharina. “Mass spectrometry as a basis for the selection of CVD precursors”. PROCEEDINGS OF EUROCVD-15. The Electrochemical Society, 2005. 276-283.
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