Interlayer composition and interface stability in Mo/Si multilayers studied with high-resolution RBS
Heidemann B, Tappe T, Schmiedeskamp B, Heinzmann U (1994)
Applied Surface Science 78(2): 133-140.
Zeitschriftenaufsatz
| Veröffentlicht | Englisch
Download
Autor*in
Heidemann, B.;
Tappe, T.;
Schmiedeskamp, B.;
Heinzmann, UlrichUniBi
Erscheinungsjahr
1994
Zeitschriftentitel
Applied Surface Science
Band
78
Ausgabe
2
Seite(n)
133-140
ISSN
0169-4332
Page URI
https://pub.uni-bielefeld.de/record/1780462
Zitieren
Heidemann B, Tappe T, Schmiedeskamp B, Heinzmann U. Interlayer composition and interface stability in Mo/Si multilayers studied with high-resolution RBS. Applied Surface Science. 1994;78(2):133-140.
Heidemann, B., Tappe, T., Schmiedeskamp, B., & Heinzmann, U. (1994). Interlayer composition and interface stability in Mo/Si multilayers studied with high-resolution RBS. Applied Surface Science, 78(2), 133-140. https://doi.org/10.1016/0169-4332(94)00114-6
Heidemann, B., Tappe, T., Schmiedeskamp, B., and Heinzmann, Ulrich. 1994. “Interlayer composition and interface stability in Mo/Si multilayers studied with high-resolution RBS”. Applied Surface Science 78 (2): 133-140.
Heidemann, B., Tappe, T., Schmiedeskamp, B., and Heinzmann, U. (1994). Interlayer composition and interface stability in Mo/Si multilayers studied with high-resolution RBS. Applied Surface Science 78, 133-140.
Heidemann, B., et al., 1994. Interlayer composition and interface stability in Mo/Si multilayers studied with high-resolution RBS. Applied Surface Science, 78(2), p 133-140.
B. Heidemann, et al., “Interlayer composition and interface stability in Mo/Si multilayers studied with high-resolution RBS”, Applied Surface Science, vol. 78, 1994, pp. 133-140.
Heidemann, B., Tappe, T., Schmiedeskamp, B., Heinzmann, U.: Interlayer composition and interface stability in Mo/Si multilayers studied with high-resolution RBS. Applied Surface Science. 78, 133-140 (1994).
Heidemann, B., Tappe, T., Schmiedeskamp, B., and Heinzmann, Ulrich. “Interlayer composition and interface stability in Mo/Si multilayers studied with high-resolution RBS”. Applied Surface Science 78.2 (1994): 133-140.
Alle Dateien verfügbar unter der/den folgenden Lizenz(en):
Copyright Statement:
Dieses Objekt ist durch das Urheberrecht und/oder verwandte Schutzrechte geschützt. [...]
Volltext(e)
Name
Access Level
Open Access
Zuletzt Hochgeladen
2019-09-06T08:48:32Z
MD5 Prüfsumme
68088692a9497c5cf9ad0c75e9a32110
Export
Markieren/ Markierung löschen
Markierte Publikationen
Web of Science
Dieser Datensatz im Web of Science®Suchen in
Google Scholar