In situ scanning-tunneling-microscopy studies of early-stage electromigration in Ag

Levine LE, Reiss G, Smith DA (1993)
Physical Review, B 48(2): 858-863.

Zeitschriftenaufsatz | Veröffentlicht | Englisch
 
Download
OA
Autor*in
Levine, L. E.; Reiss, GünterUniBi ; Smith, D. A.
Abstract / Bemerkung
The mass-transport mechanisms that are responsible for the early stages (resistance change <1 percent) of electromigration damage in metals are poorly understood. A deeper understanding of these processes is important both for the direct application to metal lines in electronic devices and for expanding our basic knowledge of these complex phenomena. A major reason for our lack of understanding is that the structural changes that must take place during early-stage electromigration occur at extremely small length scales that are beyond the resolution capabilities of conventional electromigration experiments. We report in situ studies of early-stage electromigration using scanning tunneling microscopy. A single 2-my square region of a 2100-Å Ag film was studied under UHV conditions for over 200 h with current densities up to 4.5×10 to the power of 4 A/cm2. Although the temperature and resistivity of the sample remained nearly constant throughout this period, significant small-scale morphology changes occurred that were a result of the applied current.
Erscheinungsjahr
1993
Zeitschriftentitel
Physical Review, B
Band
48
Ausgabe
2
Seite(n)
858-863
ISSN
ARRAY(0x7a822b8)
Page URI
https://pub.uni-bielefeld.de/record/1775390

Zitieren

Levine LE, Reiss G, Smith DA. In situ scanning-tunneling-microscopy studies of early-stage electromigration in Ag. Physical Review, B. 1993;48(2):858-863.
Levine, L. E., Reiss, G., & Smith, D. A. (1993). In situ scanning-tunneling-microscopy studies of early-stage electromigration in Ag. Physical Review, B, 48(2), 858-863. doi:10.1103/PhysRevB.48.85
Levine, L. E., Reiss, G., and Smith, D. A. (1993). In situ scanning-tunneling-microscopy studies of early-stage electromigration in Ag. Physical Review, B 48, 858-863.
Levine, L.E., Reiss, G., & Smith, D.A., 1993. In situ scanning-tunneling-microscopy studies of early-stage electromigration in Ag. Physical Review, B, 48(2), p 858-863.
L.E. Levine, G. Reiss, and D.A. Smith, “In situ scanning-tunneling-microscopy studies of early-stage electromigration in Ag”, Physical Review, B, vol. 48, 1993, pp. 858-863.
Levine, L.E., Reiss, G., Smith, D.A.: In situ scanning-tunneling-microscopy studies of early-stage electromigration in Ag. Physical Review, B. 48, 858-863 (1993).
Levine, L. E., Reiss, Günter, and Smith, D. A. “In situ scanning-tunneling-microscopy studies of early-stage electromigration in Ag”. Physical Review, B 48.2 (1993): 858-863.
Alle Dateien verfügbar unter der/den folgenden Lizenz(en):
Copyright Statement:
This Item is protected by copyright and/or related rights. [...]
Volltext(e)
Access Level
OA Open Access
Zuletzt Hochgeladen
2019-09-06T08:48:17Z
MD5 Prüfsumme
29686dca1c92236cdd0b7663e692057a

Export

Markieren/ Markierung löschen
Markierte Publikationen

Open Data PUB

Web of Science

Dieser Datensatz im Web of Science®

Quellen

PMID: 10007942
PubMed | Europe PMC

Suchen in

Google Scholar