Sub-micron grating formation in Ta2O5-waveguides by femtosecond UV-laser ablation
Beinhorn F, Ihlemann J, Simon P, Marowsky G, Maisenhölder B, Edlinger J, Neuschäfer D, Anselmetti D (1999)
Applied surface science 138-139: 107-110.
Zeitschriftenaufsatz
| Veröffentlicht | Englisch
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Autor*in
Beinhorn, Frank;
Ihlemann, Jürgen;
Simon, Peter;
Marowsky, Gerd;
Maisenhölder, Bernd;
Edlinger, Johannes;
Neuschäfer, Dieter;
Anselmetti, DarioUniBi 
Abstract / Bemerkung
Sub-micron-period surface gratings on Ta2O5 waveguide layers were produced by ablation with a sub-ps-UV-laser. The structure is generated by projection imaging of a primary transmission grating mask. A grating of 500 nm period with a surface modulation depth of 10 nm on a sample area of about 300 µm × 300 µm can be produced with a single laser pulse of about 100 mJ/cm² at 248 nm. Adjustment of the modulation depth to specific requirements can be accomplished by varying laser fluence or pulse number. The structures can be used as grating couplers.
Stichworte
Femtosecond laser;
Micro patterning;
Laser ablation;
Grating
Erscheinungsjahr
1999
Zeitschriftentitel
Applied surface science
Band
138-139
Seite(n)
107-110
ISSN
0169-4332
Page URI
https://pub.uni-bielefeld.de/record/1773258
Zitieren
Beinhorn F, Ihlemann J, Simon P, et al. Sub-micron grating formation in Ta2O5-waveguides by femtosecond UV-laser ablation. Applied surface science. 1999;138-139:107-110.
Beinhorn, F., Ihlemann, J., Simon, P., Marowsky, G., Maisenhölder, B., Edlinger, J., Neuschäfer, D., et al. (1999). Sub-micron grating formation in Ta2O5-waveguides by femtosecond UV-laser ablation. Applied surface science, 138-139, 107-110. https://doi.org/10.1016/S0169-4332(98)00390-0
Beinhorn, Frank, Ihlemann, Jürgen, Simon, Peter, Marowsky, Gerd, Maisenhölder, Bernd, Edlinger, Johannes, Neuschäfer, Dieter, and Anselmetti, Dario. 1999. “Sub-micron grating formation in Ta2O5-waveguides by femtosecond UV-laser ablation”. Applied surface science 138-139: 107-110.
Beinhorn, F., Ihlemann, J., Simon, P., Marowsky, G., Maisenhölder, B., Edlinger, J., Neuschäfer, D., and Anselmetti, D. (1999). Sub-micron grating formation in Ta2O5-waveguides by femtosecond UV-laser ablation. Applied surface science 138-139, 107-110.
Beinhorn, F., et al., 1999. Sub-micron grating formation in Ta2O5-waveguides by femtosecond UV-laser ablation. Applied surface science, 138-139, p 107-110.
F. Beinhorn, et al., “Sub-micron grating formation in Ta2O5-waveguides by femtosecond UV-laser ablation”, Applied surface science, vol. 138-139, 1999, pp. 107-110.
Beinhorn, F., Ihlemann, J., Simon, P., Marowsky, G., Maisenhölder, B., Edlinger, J., Neuschäfer, D., Anselmetti, D.: Sub-micron grating formation in Ta2O5-waveguides by femtosecond UV-laser ablation. Applied surface science. 138-139, 107-110 (1999).
Beinhorn, Frank, Ihlemann, Jürgen, Simon, Peter, Marowsky, Gerd, Maisenhölder, Bernd, Edlinger, Johannes, Neuschäfer, Dieter, and Anselmetti, Dario. “Sub-micron grating formation in Ta2O5-waveguides by femtosecond UV-laser ablation”. Applied surface science 138-139 (1999): 107-110.
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