MO/SI MULTILAYER-COATED RULED BLAZED GRATINGS FOR THE SOFT-X-RAY REGION

KLEINEBERG U, OSTERRIED K, STOCK HJ, MENKE D, SCHMIEDESKAMP B, FUCH D, MULLER P, SCHOLZE F, HEIDEMANN KF, NELLES B, Heinzmann U (1995)
APPLIED OPTICS 34(28): 6506-6512.

Zeitschriftenaufsatz | Veröffentlicht | Englisch
 
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Abstract / Bemerkung
Two Mo/Si multilayer-coated blazed gratings have been fabricated for operation at soft-x-ray wavelengths above the SiL edge, lambda 12.4 nm, at (near) normal incidence. The sawtooth profile of the grating structure was mechanically ruled into a 200-nm Au film that was deposited onto a plane glass substrate. To smooth the rough Au surface and to prevent interdiffusion of the Au film with the upper Mo/Si multilayer, a carbon film was evaporated onto the Au grating surface of one of the grating before the deposition of the multilayer coating. We matched the multilayer grating, working on blaze in the third diffraction order, in which an absolute diffraction efficiency of 3.4% at a wavelength of 14 nm was measured, whereas only 1.1% was achieved for a similar grating (without a carbon interlayer). These efficiencies are higher than those obtained for other ruled blazed gratings reported in the literature. As a result of the multilayer and grating periodicity, the wavelength of diffraction can be tuned by a rotation of the grating, which is important for application in a soft-x-ray monochromator.
Stichworte
MULTILAYER COATING; DIFFRACTION GRATING; SOFT-X-RAY RADIATION
Erscheinungsjahr
1995
Zeitschriftentitel
APPLIED OPTICS
Band
34
Ausgabe
28
Seite(n)
6506-6512
ISSN
0003-6935
eISSN
1539-4522
Page URI
https://pub.uni-bielefeld.de/record/1640073

Zitieren

KLEINEBERG U, OSTERRIED K, STOCK HJ, et al. MO/SI MULTILAYER-COATED RULED BLAZED GRATINGS FOR THE SOFT-X-RAY REGION. APPLIED OPTICS. 1995;34(28):6506-6512.
KLEINEBERG, U., OSTERRIED, K., STOCK, H. J., MENKE, D., SCHMIEDESKAMP, B., FUCH, D., MULLER, P., et al. (1995). MO/SI MULTILAYER-COATED RULED BLAZED GRATINGS FOR THE SOFT-X-RAY REGION. APPLIED OPTICS, 34(28), 6506-6512. doi:10.1364/AO.34.006506
KLEINEBERG, U., OSTERRIED, K., STOCK, H. J., MENKE, D., SCHMIEDESKAMP, B., FUCH, D., MULLER, P., SCHOLZE, F., HEIDEMANN, K. F., NELLES, B., et al. (1995). MO/SI MULTILAYER-COATED RULED BLAZED GRATINGS FOR THE SOFT-X-RAY REGION. APPLIED OPTICS 34, 6506-6512.
KLEINEBERG, U., et al., 1995. MO/SI MULTILAYER-COATED RULED BLAZED GRATINGS FOR THE SOFT-X-RAY REGION. APPLIED OPTICS, 34(28), p 6506-6512.
U. KLEINEBERG, et al., “MO/SI MULTILAYER-COATED RULED BLAZED GRATINGS FOR THE SOFT-X-RAY REGION”, APPLIED OPTICS, vol. 34, 1995, pp. 6506-6512.
KLEINEBERG, U., OSTERRIED, K., STOCK, H.J., MENKE, D., SCHMIEDESKAMP, B., FUCH, D., MULLER, P., SCHOLZE, F., HEIDEMANN, K.F., NELLES, B., Heinzmann, U.: MO/SI MULTILAYER-COATED RULED BLAZED GRATINGS FOR THE SOFT-X-RAY REGION. APPLIED OPTICS. 34, 6506-6512 (1995).
KLEINEBERG, U, OSTERRIED, K, STOCK, HJ, MENKE, D, SCHMIEDESKAMP, B, FUCH, D, MULLER, P, SCHOLZE, F, HEIDEMANN, KF, NELLES, B, and Heinzmann, Ulrich. “MO/SI MULTILAYER-COATED RULED BLAZED GRATINGS FOR THE SOFT-X-RAY REGION”. APPLIED OPTICS 34.28 (1995): 6506-6512.

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