PUB - Publikationen an der Universität Bielefeld

Mo-Si multilayer coated laminar and blase gratings with about 1200 L/mm have been manufactured for near normal incidence operation at soft x-ray wavelengths above the Si L-edge lambda greater than or equal to 12.4 nm. Higher diffraction efficiencies (up to 11% at lambda = 13.6 nm), as opposed to simple amplitude gratings, are achieved for a soft x-ray laminar phase grating coated with 24 Mo/Si bilayers. Two mechanically ruled blaze gratings have been coated with Mo/Si multilayers. The maximum Ist order efficiency of 32% at lambda = 13.8 nm has been achieved for one of them due to a refined groove forming technique and an optimum matching of the blaze angle (0.8 degrees) and the bilayer thickness (10.5 nm).