PUB - Publikationen an der Universität Bielefeld

A novel chemical approach was demonstrated for the growth of high-quality, silver films by CVD. This concept relies on the catalytic reactivity of cationic silver, and of silver surfaces with alcohols. This leads to high-purity films using either state-of-the-art precursors or silver salts that have not been yet considered as CVD precursors. The occurrence of the catalytic oxidative-dehvdrogenation of alcohols, considered as the driving force in this process, was shown by in-situ mass spectrometry (MS). Films of fcc-Ag with p <= 2 mu Omega cm were grown without any noticeable contamination. Ag(hfac)COD leads to the growth of a (111) highly orientated film on glass at a rate of 1.66 nm min(-1), while polycrystalline films are grown at a rate of 18.5 run min(-1) using AgNO3.