Catalytically enhanced H2-free CVD of transition metals using commercially available precursors
Bahlawane N, Premkumar PA, Onwuka K, Rott K, Reiss G, Kohse-Höinghaus K (2007)
SURFACE & COATINGS TECHNOLOGY 201(22-23): 8914-8918.
Zeitschriftenaufsatz
| Veröffentlicht | Englisch
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Autor*in
Bahlawane, NaoufalUniBi 
;
Premkumar, P. Anthony;
Onwuka, Kenneth;
Rott, KarstenUniBi;
Reiss, GünterUniBi ;
Kohse-Höinghaus, KatharinaUniBi
;
Premkumar, P. Anthony;
Onwuka, Kenneth;
Rott, KarstenUniBi;
Reiss, GünterUniBi ;
Kohse-Höinghaus, KatharinaUniBiEinrichtung
Abstract / Bemerkung
The deposition of metals using thermal CVD in a hydrogen-free atmosphere was investigated starting from nontoxic metalorganic precursors. A remarkably simple process, which relies on the chemical reduction by alcohols, allows the deposition of high-quality films of a variety of metals and alloys. The growth characteristics of metal films are investigated as a function of temperature, and their performance is discussed in terms of electrical resistivity. Near-bulk resistivities were obtained for Ni, Co, Cu, and Ag, while Fe presents a 37-fold higher resistivity than the bulk because of the poor packing of crystallites. In this work, the deposition conditions for the growth of single-phase cubic or hexagonal nickel were determined. (c) 2007 Elsevier B.V. All rights reserved.
Stichworte
CVD of metals;
nickel;
cobalt;
catalytically enhanced CVD;
iron;
copper;
alcohol assisted CVD;
alloys;
silver
Erscheinungsjahr
2007
Zeitschriftentitel
SURFACE & COATINGS TECHNOLOGY
Band
201
Ausgabe
22-23
Seite(n)
8914-8918
ISSN
0257-8972
Page URI
https://pub.uni-bielefeld.de/record/1632412
Zitieren
Bahlawane N, Premkumar PA, Onwuka K, Rott K, Reiss G, Kohse-Höinghaus K. Catalytically enhanced H2-free CVD of transition metals using commercially available precursors. SURFACE & COATINGS TECHNOLOGY. 2007;201(22-23):8914-8918.
Bahlawane, N., Premkumar, P. A., Onwuka, K., Rott, K., Reiss, G., & Kohse-Höinghaus, K. (2007). Catalytically enhanced H2-free CVD of transition metals using commercially available precursors. SURFACE & COATINGS TECHNOLOGY, 201(22-23), 8914-8918. https://doi.org/10.1016/j.surfcoat.2007.04.047
Bahlawane, Naoufal, Premkumar, P. Anthony, Onwuka, Kenneth, Rott, Karsten, Reiss, Günter, and Kohse-Höinghaus, Katharina. 2007. “Catalytically enhanced H2-free CVD of transition metals using commercially available precursors”. SURFACE & COATINGS TECHNOLOGY 201 (22-23): 8914-8918.
Bahlawane, N., Premkumar, P. A., Onwuka, K., Rott, K., Reiss, G., and Kohse-Höinghaus, K. (2007). Catalytically enhanced H2-free CVD of transition metals using commercially available precursors. SURFACE & COATINGS TECHNOLOGY 201, 8914-8918.
Bahlawane, N., et al., 2007. Catalytically enhanced H2-free CVD of transition metals using commercially available precursors. SURFACE & COATINGS TECHNOLOGY, 201(22-23), p 8914-8918.
N. Bahlawane, et al., “Catalytically enhanced H2-free CVD of transition metals using commercially available precursors”, SURFACE & COATINGS TECHNOLOGY, vol. 201, 2007, pp. 8914-8918.
Bahlawane, N., Premkumar, P.A., Onwuka, K., Rott, K., Reiss, G., Kohse-Höinghaus, K.: Catalytically enhanced H2-free CVD of transition metals using commercially available precursors. SURFACE & COATINGS TECHNOLOGY. 201, 8914-8918 (2007).
Bahlawane, Naoufal, Premkumar, P. Anthony, Onwuka, Kenneth, Rott, Karsten, Reiss, Günter, and Kohse-Höinghaus, Katharina. “Catalytically enhanced H2-free CVD of transition metals using commercially available precursors”. SURFACE & COATINGS TECHNOLOGY 201.22-23 (2007): 8914-8918.
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