Fabrication and characterization of EUV multilayer mirrors optimized for small spectral reflection bandwidth

Lim YC, Westermalbesloh T, Aschentrup A, Wehmeyer O, Haindl G, Kleineberg U, Heinzmann U (2001)
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 72(1): 121-124.

Zeitschriftenaufsatz | Veröffentlicht | Englisch
 
Download
Es wurde kein Volltext hochgeladen. Nur Publikationsnachweis!
Autor/in
; ; ; ; ; ;
Abstract / Bemerkung
Our aim was to produce EUV multilayer mirrors with a small spectral bandwidth DeltaE less than or equal to 3 eV at 70 eV peak energy using UHV electron beam evaporation by varying the thickness ratio (Gamma = d(Abs)/d(Sp) + d(Abs)) between the absorber layer and the bilayer. The deposition process was controlled by in situ soft X-ray reflectometry, and ion-beam polishing as well as substrate-heating methods were applied to reduce the interface roughness. The reflection properties of the Mo-Si multilayer mirrors prepared were characterized by hard and soft X-ray reflectometry and details of the multilayer structure were revealed from cross-sectional transmission electron microscopy.
Erscheinungsjahr
2001
Zeitschriftentitel
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Band
72
Ausgabe
1
Seite(n)
121-124
ISSN
0947-8396
Page URI
https://pub.uni-bielefeld.de/record/1618213

Zitieren

Lim YC, Westermalbesloh T, Aschentrup A, et al. Fabrication and characterization of EUV multilayer mirrors optimized for small spectral reflection bandwidth. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING. 2001;72(1):121-124.
Lim, Y. C., Westermalbesloh, T., Aschentrup, A., Wehmeyer, O., Haindl, G., Kleineberg, U., & Heinzmann, U. (2001). Fabrication and characterization of EUV multilayer mirrors optimized for small spectral reflection bandwidth. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 72(1), 121-124. doi:10.1007/s003390000723
Lim, Y. C., Westermalbesloh, T., Aschentrup, A., Wehmeyer, O., Haindl, G., Kleineberg, U., and Heinzmann, U. (2001). Fabrication and characterization of EUV multilayer mirrors optimized for small spectral reflection bandwidth. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 72, 121-124.
Lim, Y.C., et al., 2001. Fabrication and characterization of EUV multilayer mirrors optimized for small spectral reflection bandwidth. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 72(1), p 121-124.
Y.C. Lim, et al., “Fabrication and characterization of EUV multilayer mirrors optimized for small spectral reflection bandwidth”, APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, vol. 72, 2001, pp. 121-124.
Lim, Y.C., Westermalbesloh, T., Aschentrup, A., Wehmeyer, O., Haindl, G., Kleineberg, U., Heinzmann, U.: Fabrication and characterization of EUV multilayer mirrors optimized for small spectral reflection bandwidth. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING. 72, 121-124 (2001).
Lim, YC, Westermalbesloh, T, Aschentrup, A, Wehmeyer, O, Haindl, G, Kleineberg, U, and Heinzmann, Ulrich. “Fabrication and characterization of EUV multilayer mirrors optimized for small spectral reflection bandwidth”. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 72.1 (2001): 121-124.