Phosphane-stabilized silver(1)-carboxylates: Synthesis and use in silver CVD
Schmidt H, Shen Y, Leschke M, Haase T, Kohse-Höinghaus K, Lang H (2003)
JOURNAL OF ORGANOMETALLIC CHEMISTRY 669(1-2): 25-31.
Zeitschriftenaufsatz
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Autor*in
Schmidt, H.;
Shen, Y.;
Leschke, M.;
Haase, Thomas;
Kohse-Höinghaus, KatharinaUniBi;
Lang, Heinrich
Einrichtung
Abstract / Bemerkung
The synthesis of the silver(I)-carboxylate complexes [(R-3'P)(n)AgO2CR] (n = 1, R'= "Bu: 3a, R = CF3; 3b, R = C2F5; R' = C6H4CH2NMe2-2: 3c, R = CF3; 3d, R = C2F5; n = 2, R' = "Bu: 4a, R = CF3; 4b: R = C2F5) succeeds, when [AgO2CR] (1a, R = CF3; 1b, R = C2F5) is reacted with n equivalents of PR3'(2a, R'= "Bu; 2b, R'= C6CH2NMe2-2) (n = 1, 2); the yield amounts to 83-98%. Complexes 3 and 4 can be used for the deposition of silver on titaniumnitride-coated SiO2-wafers by the chemical vapour deposition (CVD) process, which could be shown by applying 4a as suitable precursor. REM studies show that closed silver layers were formed with a silver particle size between 50 and 100 nm. (C) 2003 Elsevier Science B.V. All rights reserved.
Erscheinungsjahr
2003
Zeitschriftentitel
JOURNAL OF ORGANOMETALLIC CHEMISTRY
Band
669
Ausgabe
1-2
Seite(n)
25-31
ISSN
0022-328X
Page URI
https://pub.uni-bielefeld.de/record/1612250
Zitieren
Schmidt H, Shen Y, Leschke M, Haase T, Kohse-Höinghaus K, Lang H. Phosphane-stabilized silver(1)-carboxylates: Synthesis and use in silver CVD. JOURNAL OF ORGANOMETALLIC CHEMISTRY. 2003;669(1-2):25-31.
Schmidt, H., Shen, Y., Leschke, M., Haase, T., Kohse-Höinghaus, K., & Lang, H. (2003). Phosphane-stabilized silver(1)-carboxylates: Synthesis and use in silver CVD. JOURNAL OF ORGANOMETALLIC CHEMISTRY, 669(1-2), 25-31. https://doi.org/10.1016/S0022-328X(02)02166-6
Schmidt, H., Shen, Y., Leschke, M., Haase, Thomas, Kohse-Höinghaus, Katharina, and Lang, Heinrich. 2003. “Phosphane-stabilized silver(1)-carboxylates: Synthesis and use in silver CVD”. JOURNAL OF ORGANOMETALLIC CHEMISTRY 669 (1-2): 25-31.
Schmidt, H., Shen, Y., Leschke, M., Haase, T., Kohse-Höinghaus, K., and Lang, H. (2003). Phosphane-stabilized silver(1)-carboxylates: Synthesis and use in silver CVD. JOURNAL OF ORGANOMETALLIC CHEMISTRY 669, 25-31.
Schmidt, H., et al., 2003. Phosphane-stabilized silver(1)-carboxylates: Synthesis and use in silver CVD. JOURNAL OF ORGANOMETALLIC CHEMISTRY, 669(1-2), p 25-31.
H. Schmidt, et al., “Phosphane-stabilized silver(1)-carboxylates: Synthesis and use in silver CVD”, JOURNAL OF ORGANOMETALLIC CHEMISTRY, vol. 669, 2003, pp. 25-31.
Schmidt, H., Shen, Y., Leschke, M., Haase, T., Kohse-Höinghaus, K., Lang, H.: Phosphane-stabilized silver(1)-carboxylates: Synthesis and use in silver CVD. JOURNAL OF ORGANOMETALLIC CHEMISTRY. 669, 25-31 (2003).
Schmidt, H., Shen, Y., Leschke, M., Haase, Thomas, Kohse-Höinghaus, Katharina, and Lang, Heinrich. “Phosphane-stabilized silver(1)-carboxylates: Synthesis and use in silver CVD”. JOURNAL OF ORGANOMETALLIC CHEMISTRY 669.1-2 (2003): 25-31.
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