CVD of metals using alcohols and metal acetylacetonates, Part II: Role of solvent and characterization of metal films made by pulsed spray evaporation CVD

Premkumar PA, Bahlawane N, Reiss G, Kohse-Höinghaus K (2007)
CHEMICAL VAPOR DEPOSITION 13(5): 227-231.

Zeitschriftenaufsatz | Veröffentlicht | Englisch
 
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Abstract / Bemerkung
Starting from their corresponding acetylacetonate complexes, nickel, copper, and cobalt thin films are deposited in a hydrogen-free atmosphere using CVD. The investigated pulsed spray evaporation (PSE) CVD process uses precursors dissolved in an organic solvent as the feedstock. This paper reports on the major role of the solvent for the growth of metal films. Alcohol solvents such as methanol, ethanol, and n-propanol enabled the growth of metallic films, while nonalcohol solvents such as tetrahydrofuran and n-butyl acrylate failed. Higher alcohols tend to result in higher growth rates; however, they present a limited solubility of the acetylacetonate complexes. Metal films grow, starting at 493 K, on glass and other substrates with no incubation time, and the obtained films, with thicknesses below 30 nm, present a smooth morphology. Phase analysis with X-ray diffraction (XRD) reveals the hexagonal polycrystalline structure of Ni and Co, and the cubic structure of Cu.
Stichworte
alcohols; metal films; pulsed CVD; XRD; SEM; acetylacetonates
Erscheinungsjahr
2007
Zeitschriftentitel
CHEMICAL VAPOR DEPOSITION
Band
13
Ausgabe
5
Seite(n)
227-231
ISSN
0948-1907
eISSN
1521-3862
Page URI
https://pub.uni-bielefeld.de/record/1593715

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Premkumar PA, Bahlawane N, Reiss G, Kohse-Höinghaus K. CVD of metals using alcohols and metal acetylacetonates, Part II: Role of solvent and characterization of metal films made by pulsed spray evaporation CVD. CHEMICAL VAPOR DEPOSITION. 2007;13(5):227-231.
Premkumar, P. A., Bahlawane, N., Reiss, G., & Kohse-Höinghaus, K. (2007). CVD of metals using alcohols and metal acetylacetonates, Part II: Role of solvent and characterization of metal films made by pulsed spray evaporation CVD. CHEMICAL VAPOR DEPOSITION, 13(5), 227-231. doi:10.1002/cvde.200606573
Premkumar, P. A., Bahlawane, N., Reiss, G., and Kohse-Höinghaus, K. (2007). CVD of metals using alcohols and metal acetylacetonates, Part II: Role of solvent and characterization of metal films made by pulsed spray evaporation CVD. CHEMICAL VAPOR DEPOSITION 13, 227-231.
Premkumar, P.A., et al., 2007. CVD of metals using alcohols and metal acetylacetonates, Part II: Role of solvent and characterization of metal films made by pulsed spray evaporation CVD. CHEMICAL VAPOR DEPOSITION, 13(5), p 227-231.
P.A. Premkumar, et al., “CVD of metals using alcohols and metal acetylacetonates, Part II: Role of solvent and characterization of metal films made by pulsed spray evaporation CVD”, CHEMICAL VAPOR DEPOSITION, vol. 13, 2007, pp. 227-231.
Premkumar, P.A., Bahlawane, N., Reiss, G., Kohse-Höinghaus, K.: CVD of metals using alcohols and metal acetylacetonates, Part II: Role of solvent and characterization of metal films made by pulsed spray evaporation CVD. CHEMICAL VAPOR DEPOSITION. 13, 227-231 (2007).
Premkumar, Peter Antony, Bahlawane, Naoufal, Reiss, Günter, and Kohse-Höinghaus, Katharina. “CVD of metals using alcohols and metal acetylacetonates, Part II: Role of solvent and characterization of metal films made by pulsed spray evaporation CVD”. CHEMICAL VAPOR DEPOSITION 13.5 (2007): 227-231.