Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering

Siffalovic P, Majkova E, Chitu L, Jergel M, Luby S, Keckes J, Maier G, Timmann A, Roth SV, Tsuru T, Harada T, et al. (2009)
Vacuum 84(1): 19-25.

Konferenzbeitrag | Veröffentlicht | Englisch
 
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Abstract / Bemerkung
The morphology of buried interfaces plays a key role in high performing Mo/Si soft X-ray mirrors. We show that grazing-incidence small-angle X-ray scattering is a highly effective and non-destructive diagnostic technique for analysis of buried interfaces. The parameters of average interface autocorrelation function can be determined unambiguously. Additionally period thickness, roughness of interfaces and an effective number of vertically correlated periods can be extracted. The multilayer mirrors were prepared by e-beam evaporation on heated and unheated substrates, ion beam assisted e-beam evaporation, ion beam sputtering and RF magnetron sputtering. The latter three techniques produce multilayer mirrors with comparable interface roughness. The differences in lateral correlation length and Hurst parameter are found. (C) 2009 Elsevier Ltd. All rights reserved.
Stichworte
GISAXS; X-ray mirrors; Interface analysis; Mo/Si multilayers
Erscheinungsjahr
2009
Band
84
Ausgabe
1
Seite(n)
19-25
ISSN
0042-207X
Page URI
https://pub.uni-bielefeld.de/record/1590287

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Siffalovic P, Majkova E, Chitu L, et al. Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering. Vacuum. 2009;84(1):19-25.
Siffalovic, P., Majkova, E., Chitu, L., Jergel, M., Luby, S., Keckes, J., Maier, G., et al. (2009). Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering. Vacuum, 84(1), 19-25. doi:10.1016/j.vacuum.2009.04.026
Siffalovic, P., Majkova, E., Chitu, L., Jergel, M., Luby, S., Keckes, J., Maier, G., Timmann, A., Roth, S. V., Tsuru, T., et al. (2009). Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering. Vacuum 84, 19-25.
Siffalovic, P., et al., 2009. Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering. Vacuum, 84(1), p 19-25.
P. Siffalovic, et al., “Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering”, Vacuum, vol. 84, 2009, pp. 19-25.
Siffalovic, P., Majkova, E., Chitu, L., Jergel, M., Luby, S., Keckes, J., Maier, G., Timmann, A., Roth, S.V., Tsuru, T., Harada, T., Yamamoto, M., Heinzmann, U.: Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering. Vacuum. 84, 19-25 (2009).
Siffalovic, P., Majkova, E., Chitu, L., Jergel, M., Luby, S., Keckes, J., Maier, G., Timmann, A., Roth, S. V., Tsuru, T., Harada, T., Yamamoto, M., and Heinzmann, Ulrich. “Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering”. Vacuum 84.1 (2009): 19-25.