Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering

Siffalovic P, Majkova E, Chitu L, Jergel M, Luby S, Keckes J, Maier G, Timmann A, Roth SV, Tsuru T, Harada T, et al. (2009)
In: Vacuum. Vacuum, 84(1). Pergamon-Elsevier Science: 19-25.

Konferenzbeitrag | Veröffentlicht | Englisch
 
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Autor*in
Siffalovic, P.; Majkova, E.; Chitu, L.; Jergel, M.; Luby, S.; Keckes, J.; Maier, G.; Timmann, A.; Roth, S. V.; Tsuru, T.; Harada, T.; Yamamoto, M.
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Abstract / Bemerkung
The morphology of buried interfaces plays a key role in high performing Mo/Si soft X-ray mirrors. We show that grazing-incidence small-angle X-ray scattering is a highly effective and non-destructive diagnostic technique for analysis of buried interfaces. The parameters of average interface autocorrelation function can be determined unambiguously. Additionally period thickness, roughness of interfaces and an effective number of vertically correlated periods can be extracted. The multilayer mirrors were prepared by e-beam evaporation on heated and unheated substrates, ion beam assisted e-beam evaporation, ion beam sputtering and RF magnetron sputtering. The latter three techniques produce multilayer mirrors with comparable interface roughness. The differences in lateral correlation length and Hurst parameter are found. (C) 2009 Elsevier Ltd. All rights reserved.
Stichworte
GISAXS; X-ray mirrors; Interface analysis; Mo/Si multilayers
Erscheinungsjahr
2009
Titel des Konferenzbandes
Vacuum
Serien- oder Zeitschriftentitel
Vacuum
Band
84
Ausgabe
1
Seite(n)
19-25
ISSN
0042-207X
Page URI
https://pub.uni-bielefeld.de/record/1590287

Zitieren

Siffalovic P, Majkova E, Chitu L, et al. Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering. In: Vacuum. Vacuum. Vol 84. Pergamon-Elsevier Science; 2009: 19-25.
Siffalovic, P., Majkova, E., Chitu, L., Jergel, M., Luby, S., Keckes, J., Maier, G., et al. (2009). Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering. Vacuum, Vacuum, 84, 19-25. Pergamon-Elsevier Science. https://doi.org/10.1016/j.vacuum.2009.04.026
Siffalovic, P., Majkova, E., Chitu, L., Jergel, M., Luby, S., Keckes, J., Maier, G., et al. 2009. “Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering”. In Vacuum, 84:19-25. Vacuum. Pergamon-Elsevier Science.
Siffalovic, P., Majkova, E., Chitu, L., Jergel, M., Luby, S., Keckes, J., Maier, G., Timmann, A., Roth, S. V., Tsuru, T., et al. (2009). “Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering” in Vacuum Vacuum, vol. 84, (Pergamon-Elsevier Science), 19-25.
Siffalovic, P., et al., 2009. Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering. In Vacuum. Vacuum. no.84 Pergamon-Elsevier Science, pp. 19-25.
P. Siffalovic, et al., “Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering”, Vacuum, Vacuum, vol. 84, Pergamon-Elsevier Science, 2009, pp.19-25.
Siffalovic, P., Majkova, E., Chitu, L., Jergel, M., Luby, S., Keckes, J., Maier, G., Timmann, A., Roth, S.V., Tsuru, T., Harada, T., Yamamoto, M., Heinzmann, U.: Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering. Vacuum. Vacuum. 84, p. 19-25. Pergamon-Elsevier Science (2009).
Siffalovic, P., Majkova, E., Chitu, L., Jergel, M., Luby, S., Keckes, J., Maier, G., Timmann, A., Roth, S. V., Tsuru, T., Harada, T., Yamamoto, M., and Heinzmann, Ulrich. “Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering”. Vacuum. Pergamon-Elsevier Science, 2009.Vol. 84. Vacuum. 19-25.
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