Design of a compact ultrahigh vaccum-compatible setup for the analysis of chemical vapor deposition processes

Weiss T, Nowak M, Mundloch U, Zielasek V, Kohse-Höinghaus K, Bäumer M (2014)
REVIEW OF SCIENTIFIC INSTRUMENTS 85(10): 104104.

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Zeitschriftenaufsatz | Veröffentlicht | Englisch
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REVIEW OF SCIENTIFIC INSTRUMENTS
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85
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10
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104104
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Weiss T, Nowak M, Mundloch U, Zielasek V, Kohse-Höinghaus K, Bäumer M. Design of a compact ultrahigh vaccum-compatible setup for the analysis of chemical vapor deposition processes. REVIEW OF SCIENTIFIC INSTRUMENTS. 2014;85(10):104104.
Weiss, T., Nowak, M., Mundloch, U., Zielasek, V., Kohse-Höinghaus, K., & Bäumer, M. (2014). Design of a compact ultrahigh vaccum-compatible setup for the analysis of chemical vapor deposition processes. REVIEW OF SCIENTIFIC INSTRUMENTS, 85(10), 104104. doi:10.1063/1.4897620
Weiss, T., Nowak, M., Mundloch, U., Zielasek, V., Kohse-Höinghaus, K., and Bäumer, M. (2014). Design of a compact ultrahigh vaccum-compatible setup for the analysis of chemical vapor deposition processes. REVIEW OF SCIENTIFIC INSTRUMENTS 85, 104104.
Weiss, T., et al., 2014. Design of a compact ultrahigh vaccum-compatible setup for the analysis of chemical vapor deposition processes. REVIEW OF SCIENTIFIC INSTRUMENTS, 85(10), p 104104.
T. Weiss, et al., “Design of a compact ultrahigh vaccum-compatible setup for the analysis of chemical vapor deposition processes”, REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 85, 2014, pp. 104104.
Weiss, T., Nowak, M., Mundloch, U., Zielasek, V., Kohse-Höinghaus, K., Bäumer, M.: Design of a compact ultrahigh vaccum-compatible setup for the analysis of chemical vapor deposition processes. REVIEW OF SCIENTIFIC INSTRUMENTS. 85, 104104 (2014).
Weiss, Theodor, Nowak, Martin, Mundloch, Udo, Zielasek, Volkmar, Kohse-Höinghaus, Katharina, and Bäumer, Marcus. “Design of a compact ultrahigh vaccum-compatible setup for the analysis of chemical vapor deposition processes”. REVIEW OF SCIENTIFIC INSTRUMENTS 85.10 (2014): 104104.

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