Self-sensing atomic force microscopy cantilevers based on tunnel magnetoresistance sensors

Tavassolizadeh A, Meier T, Rott K, Reiss G, Quandt E, Hoelscher H, Meyners D (2013)
Applied Physics Letters 102(15): 153104.

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Zeitschriftenaufsatz | Veröffentlicht | Englisch
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Abstract / Bemerkung
Here, we introduce self-sensing cantilevers for atomic force microscopy (AFM) based on tunnel magnetoresistance (TMR) sensors. These TMR sensors are integrated into the AFM cantilevers and consist of a magnetically stable layer and a sensing magnetostrictive CoFeB layer separated by a MgO tunneling barrier and can be as small as 10 mu m x 10 mu m. Their TMR values and resistance-area products are about 121% and 61 k Omega mu m(2), respectively. A comparison of AFM data simultaneously obtained with a self-sensing cantilever with a 37 mu m x 37 mu m large TMR sensor and the conventional optical beam deflection method revealed the same data quality. (C) 2013 AIP Publishing LLC [http://dx.doi.org/10.1063/1.4801315]
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Zeitschriftentitel
Applied Physics Letters
Band
102
Zeitschriftennummer
15
Seite
153104
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Tavassolizadeh A, Meier T, Rott K, et al. Self-sensing atomic force microscopy cantilevers based on tunnel magnetoresistance sensors. Applied Physics Letters. 2013;102(15):153104.
Tavassolizadeh, A., Meier, T., Rott, K., Reiss, G., Quandt, E., Hoelscher, H., & Meyners, D. (2013). Self-sensing atomic force microscopy cantilevers based on tunnel magnetoresistance sensors. Applied Physics Letters, 102(15), 153104. doi:10.1063/1.4801315
Tavassolizadeh, A., Meier, T., Rott, K., Reiss, G., Quandt, E., Hoelscher, H., and Meyners, D. (2013). Self-sensing atomic force microscopy cantilevers based on tunnel magnetoresistance sensors. Applied Physics Letters 102, 153104.
Tavassolizadeh, A., et al., 2013. Self-sensing atomic force microscopy cantilevers based on tunnel magnetoresistance sensors. Applied Physics Letters, 102(15), p 153104.
A. Tavassolizadeh, et al., “Self-sensing atomic force microscopy cantilevers based on tunnel magnetoresistance sensors”, Applied Physics Letters, vol. 102, 2013, pp. 153104.
Tavassolizadeh, A., Meier, T., Rott, K., Reiss, G., Quandt, E., Hoelscher, H., Meyners, D.: Self-sensing atomic force microscopy cantilevers based on tunnel magnetoresistance sensors. Applied Physics Letters. 102, 153104 (2013).
Tavassolizadeh, Ali, Meier, Tobias, Rott, Karsten, Reiss, Günter, Quandt, Eckhard, Hoelscher, Hendrik, and Meyners, Dirk. “Self-sensing atomic force microscopy cantilevers based on tunnel magnetoresistance sensors”. Applied Physics Letters 102.15 (2013): 153104.