Thin-film UV detectors based on hydrogenated amorphous silicon and its alloys

Krause M, Topic M, Stiebig H, Wagner H (2001)
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE 185(1): 121-127.

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Zeitschriftenaufsatz | Veröffentlicht | Englisch
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Abstract / Bemerkung
Thin film ultraviolet detectors based on hydrogenated amorphous silicon alloys are realized with different diode structures (PIN, NIP, PN, and NP). The PIN and NIP detectors exhibit higher sensitivity in the ultraviolet spectrum and a significant lower dark current in comparison to the PN or NP structures. The best detector performance was achieved with a 33 nm thick PIN diode. This detector shows a maximum of quantum efficiency of 36.3% at a wavelength of 310 nm. By varying the thickness of the semi-transparent Ag front contact the selectivity of the detectors with the quantum Cefficiency peak at 320 nm can be adjusted. Thus, the spectral sensitivity of the detector shifts from a broad UV to a selective UV-B spectrum.
Erscheinungsjahr
Zeitschriftentitel
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Band
185
Zeitschriftennummer
1
Seite
121-127
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Krause M, Topic M, Stiebig H, Wagner H. Thin-film UV detectors based on hydrogenated amorphous silicon and its alloys. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE. 2001;185(1):121-127.
Krause, M., Topic, M., Stiebig, H., & Wagner, H. (2001). Thin-film UV detectors based on hydrogenated amorphous silicon and its alloys. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 185(1), 121-127. doi:10.1002/1521-396X(200105)185:1<121::AID-PSSA121>3.0.CO;2-I
Krause, M., Topic, M., Stiebig, H., and Wagner, H. (2001). Thin-film UV detectors based on hydrogenated amorphous silicon and its alloys. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE 185, 121-127.
Krause, M., et al., 2001. Thin-film UV detectors based on hydrogenated amorphous silicon and its alloys. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 185(1), p 121-127.
M. Krause, et al., “Thin-film UV detectors based on hydrogenated amorphous silicon and its alloys”, PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, vol. 185, 2001, pp. 121-127.
Krause, M., Topic, M., Stiebig, H., Wagner, H.: Thin-film UV detectors based on hydrogenated amorphous silicon and its alloys. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE. 185, 121-127 (2001).
Krause, M, Topic, M, Stiebig, Helmut, and Wagner, H. “Thin-film UV detectors based on hydrogenated amorphous silicon and its alloys”. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE 185.1 (2001): 121-127.