Influence of low temperature thermal annealing on the performance of microcrystalline silicon thin-film transistors

Chan KY, Bunte E, Stiebig H, Knipp D (2007)
J. Appl. Phys. 101(7): 074503.

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Zeitschriftenaufsatz | Veröffentlicht | Englisch
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Erscheinungsjahr
Zeitschriftentitel
J. Appl. Phys.
Band
101
Zeitschriftennummer
7
Seite
074503
ISSN
PUB-ID

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Chan KY, Bunte E, Stiebig H, Knipp D. Influence of low temperature thermal annealing on the performance of microcrystalline silicon thin-film transistors. J. Appl. Phys. 2007;101(7):074503.
Chan, K. Y., Bunte, E., Stiebig, H., & Knipp, D. (2007). Influence of low temperature thermal annealing on the performance of microcrystalline silicon thin-film transistors. J. Appl. Phys., 101(7), 074503. doi:10.1063/1.2710762
Chan, K. Y., Bunte, E., Stiebig, H., and Knipp, D. (2007). Influence of low temperature thermal annealing on the performance of microcrystalline silicon thin-film transistors. J. Appl. Phys. 101, 074503.
Chan, K.Y., et al., 2007. Influence of low temperature thermal annealing on the performance of microcrystalline silicon thin-film transistors. J. Appl. Phys., 101(7), p 074503.
K.Y. Chan, et al., “Influence of low temperature thermal annealing on the performance of microcrystalline silicon thin-film transistors”, J. Appl. Phys., vol. 101, 2007, pp. 074503.
Chan, K.Y., Bunte, E., Stiebig, H., Knipp, D.: Influence of low temperature thermal annealing on the performance of microcrystalline silicon thin-film transistors. J. Appl. Phys. 101, 074503 (2007).
Chan, K.Y., Bunte, E., Stiebig, Helmut, and Knipp, D. “Influence of low temperature thermal annealing on the performance of microcrystalline silicon thin-film transistors”. J. Appl. Phys. 101.7 (2007): 074503.