FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES

ARMANTROUT GA, Miller D, VINDELOV KE, BROWN TG (1979)
Journal of Vacuum Science and Technology 16(2): 212-215.

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ARMANTROUT GA, Miller D, VINDELOV KE, BROWN TG. FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES. Journal of Vacuum Science and Technology. 1979;16(2):212-215.
ARMANTROUT, G. A., Miller, D., VINDELOV, K. E., & BROWN, T. G. (1979). FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES. Journal of Vacuum Science and Technology, 16(2), 212-215.
ARMANTROUT, G. A., Miller, D., VINDELOV, K. E., and BROWN, T. G. (1979). FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES. Journal of Vacuum Science and Technology 16, 212-215.
ARMANTROUT, G.A., et al., 1979. FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES. Journal of Vacuum Science and Technology, 16(2), p 212-215.
G.A. ARMANTROUT, et al., “FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES”, Journal of Vacuum Science and Technology, vol. 16, 1979, pp. 212-215.
ARMANTROUT, G.A., Miller, D., VINDELOV, K.E., BROWN, T.G.: FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES. Journal of Vacuum Science and Technology. 16, 212-215 (1979).
ARMANTROUT, GA, Miller, David, VINDELOV, KE, and BROWN, TG. “FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES”. Journal of Vacuum Science and Technology 16.2 (1979): 212-215.
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