MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS

LETTS SA, Miller D, CORLEY RA, TILLOTSON TM, WITT LA (1985)
Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films 3(3): 1277-1278.

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Kurzbeitrag Konferenz | Veröffentlicht | Englisch
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3
Zeitschriftennummer
3
Seite
1277-1278
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LETTS SA, Miller D, CORLEY RA, TILLOTSON TM, WITT LA. MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS. Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films. 1985;3(3):1277-1278.
LETTS, S. A., Miller, D., CORLEY, R. A., TILLOTSON, T. M., & WITT, L. A. (1985). MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS. Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films, 3(3), 1277-1278. doi:10.1116/1.573084
LETTS, S. A., Miller, D., CORLEY, R. A., TILLOTSON, T. M., and WITT, L. A. (1985). MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS. Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films 3, 1277-1278.
LETTS, S.A., et al., 1985. MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS. Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films, 3(3), p 1277-1278.
S.A. LETTS, et al., “MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS”, Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films, vol. 3, 1985, pp. 1277-1278.
LETTS, S.A., Miller, D., CORLEY, R.A., TILLOTSON, T.M., WITT, L.A.: MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS. Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films. 3, 1277-1278 (1985).
LETTS, SA, Miller, David, CORLEY, RA, TILLOTSON, TM, and WITT, LA. “MICROSPOT TARGET DEVELOPMENT WITH SEEDED AND PATTERNED PLASMA POLYMERS”. Journal of Vacuum Science and Technology. A, Vacuum Surfaces and Films 3.3 (1985): 1277-1278.