Identification of process-induced defects in silicon by PAC

Keller R, Deicher M, Pfeiffer W, Skudlik H, Steiner D, Wichert T (1990)
In: Defect Control in Semiconductors. Sumino K (Ed); Amsterdam: North-Holland: 377.

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Sammelwerksbeitrag | Veröffentlicht | Englisch
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Herausgeber
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Defect Control in Semiconductors
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377
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Keller R, Deicher M, Pfeiffer W, Skudlik H, Steiner D, Wichert T. Identification of process-induced defects in silicon by PAC. In: Sumino K, ed. Defect Control in Semiconductors. Amsterdam: North-Holland; 1990: 377.
Keller, R., Deicher, M., Pfeiffer, W., Skudlik, H., Steiner, D., & Wichert, T. (1990). Identification of process-induced defects in silicon by PAC. In K. Sumino (Ed.), Defect Control in Semiconductors (p. 377). Amsterdam: North-Holland.
Keller, R., Deicher, M., Pfeiffer, W., Skudlik, H., Steiner, D., and Wichert, T. (1990). “Identification of process-induced defects in silicon by PAC” in Defect Control in Semiconductors, Sumino, K. ed. (Amsterdam: North-Holland), 377.
Keller, R., et al., 1990. Identification of process-induced defects in silicon by PAC. In K. Sumino, ed. Defect Control in Semiconductors. Amsterdam: North-Holland, pp. 377.
R. Keller, et al., “Identification of process-induced defects in silicon by PAC”, Defect Control in Semiconductors, K. Sumino, ed., Amsterdam: North-Holland, 1990, pp.377.
Keller, R., Deicher, M., Pfeiffer, W., Skudlik, H., Steiner, D., Wichert, T.: Identification of process-induced defects in silicon by PAC. In: Sumino, K. (ed.) Defect Control in Semiconductors. p. 377. North-Holland, Amsterdam (1990).
Keller, R., Deicher, M., Pfeiffer, Walter, Skudlik, H., Steiner, D, and Wichert, Th. “Identification of process-induced defects in silicon by PAC”. Defect Control in Semiconductors. Ed. K. Sumino. Amsterdam: North-Holland, 1990. 377.

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