The growth of nanoscale ZnO films by pulsed-spray evaporation chemical vapor deposition and their structural, electric and optical properties

Jiang Y, Bahlawane N (2010)
Thin Solid Films 519(1): 284-288.

Journal Article | Published | English

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Abstract
Great interest in nanoscale thin films (sub-100 nm) has been stimulated by the developing demands of functional devices. In this paper, nanoscale zinc oxide (ZnO) thin films were deposited on glass substrates at 300 degrees C by pulsed-spray evaporation chemical vapor deposition. Scanning electron micrographs indicate uniform surface morphologies composed of nanometer-sized spherical particles. The growth kinetics and growth mode are studied and the relationship between the film thickness and the electric properties with respect to the growth mode is interpreted. X-ray diffraction shows that all ZnO films grown by this process were crystallized in a hexagonal structure and highly oriented with their c-axes perpendicular to the plane of the substrate. Optical measurements show transparencies above 85% in the visible spectral range for all films. The absorbance in the UV spectral range respects well the Beer-Lambert law, enabling an accurate optical thickness measurement, and the absorption coefficient was measured for a selected wavelength. The measured band gap energies exhibit an almost constant value of 3.41 eV for all films with different thicknesses, which attributed to the thickness-independent crystallite size. (C) 2010 Elsevier B.V. All rights reserved.
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Jiang Y, Bahlawane N. The growth of nanoscale ZnO films by pulsed-spray evaporation chemical vapor deposition and their structural, electric and optical properties. Thin Solid Films. 2010;519(1):284-288.
Jiang, Y., & Bahlawane, N. (2010). The growth of nanoscale ZnO films by pulsed-spray evaporation chemical vapor deposition and their structural, electric and optical properties. Thin Solid Films, 519(1), 284-288.
Jiang, Y., and Bahlawane, N. (2010). The growth of nanoscale ZnO films by pulsed-spray evaporation chemical vapor deposition and their structural, electric and optical properties. Thin Solid Films 519, 284-288.
Jiang, Y., & Bahlawane, N., 2010. The growth of nanoscale ZnO films by pulsed-spray evaporation chemical vapor deposition and their structural, electric and optical properties. Thin Solid Films, 519(1), p 284-288.
Y. Jiang and N. Bahlawane, “The growth of nanoscale ZnO films by pulsed-spray evaporation chemical vapor deposition and their structural, electric and optical properties”, Thin Solid Films, vol. 519, 2010, pp. 284-288.
Jiang, Y., Bahlawane, N.: The growth of nanoscale ZnO films by pulsed-spray evaporation chemical vapor deposition and their structural, electric and optical properties. Thin Solid Films. 519, 284-288 (2010).
Jiang, Yinzhu, and Bahlawane, Naoufal. “The growth of nanoscale ZnO films by pulsed-spray evaporation chemical vapor deposition and their structural, electric and optical properties”. Thin Solid Films 519.1 (2010): 284-288.
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