Fabrication of superconducting MgB2 thin films by magnetron co-sputtering on (001) MgO substrates

Fabretti S, Meinert M, Thomas P, Thomas A (2010) .

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Abstract
We fabricated superconducting MgB2 thin films on (001) MgO substrates. Thesamples were prepared by magnetron rf and dc co-sputtering on heatedsubstrates. They were annealed ex-situ for one hour at temperatures between450{\deg}C and 750{\deg}C. We will show that the substrate temperature duringthe sputtering process and the post annealing temperatures play a crucial rolein forming MgB2 superconducting thin films. We achieved a critical onsettemperature of 27.1K for a film thickness of 30nm. The crystal structures weremeasured by x-ray diffraction.
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Fabretti S, Meinert M, Thomas P, Thomas A. Fabrication of superconducting MgB2 thin films by magnetron co-sputtering on (001) MgO substrates. 2010.
Fabretti, S., Meinert, M., Thomas, P., & Thomas, A. (2010). Fabrication of superconducting MgB2 thin films by magnetron co-sputtering on (001) MgO substrates.
Fabretti, S., Meinert, M., Thomas, P., and Thomas, A. (2010). Fabrication of superconducting MgB2 thin films by magnetron co-sputtering on (001) MgO substrates.
Fabretti, S., et al., 2010. Fabrication of superconducting MgB2 thin films by magnetron co-sputtering on (001) MgO substrates.
S. Fabretti, et al., “Fabrication of superconducting MgB2 thin films by magnetron co-sputtering on (001) MgO substrates”, 2010.
Fabretti, S., Meinert, M., Thomas, P., Thomas, A.: Fabrication of superconducting MgB2 thin films by magnetron co-sputtering on (001) MgO substrates. (2010).
Fabretti, Savio, Meinert, Markus, Thomas, Patrick, and Thomas, Andy. “Fabrication of superconducting MgB2 thin films by magnetron co-sputtering on (001) MgO substrates”. (2010).
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