Multilayer-coated soft x-ray diffraction gratings for synchrotron radiation applications

Kleineberg U, Stock HJ, Menke D, Wehmeyer O, Heinzmann U, Fuchs D, Bulicke P, Wedwoski M, Ulm G, Heidemann KF, Osterried K (1997)
Proc. SPIE 3150.

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Kleineberg U, Stock HJ, Menke D, et al. Multilayer-coated soft x-ray diffraction gratings for synchrotron radiation applications. Proc. SPIE. 1997;3150.
Kleineberg, U., Stock, H. J., Menke, D., Wehmeyer, O., Heinzmann, U., Fuchs, D., Bulicke, P., et al. (1997). Multilayer-coated soft x-ray diffraction gratings for synchrotron radiation applications. Proc. SPIE, 3150.
Kleineberg, U., Stock, H. J., Menke, D., Wehmeyer, O., Heinzmann, U., Fuchs, D., Bulicke, P., Wedwoski, M., Ulm, G., Heidemann, K. F., et al. (1997). Multilayer-coated soft x-ray diffraction gratings for synchrotron radiation applications. Proc. SPIE 3150.
Kleineberg, U., et al., 1997. Multilayer-coated soft x-ray diffraction gratings for synchrotron radiation applications. Proc. SPIE, 3150.
U. Kleineberg, et al., “Multilayer-coated soft x-ray diffraction gratings for synchrotron radiation applications”, Proc. SPIE, vol. 3150, 1997.
Kleineberg, U., Stock, H.J., Menke, D., Wehmeyer, O., Heinzmann, U., Fuchs, D., Bulicke, P., Wedwoski, M., Ulm, G., Heidemann, K.F., Osterried, K.: Multilayer-coated soft x-ray diffraction gratings for synchrotron radiation applications. Proc. SPIE. 3150, (1997).
Kleineberg, U., Stock, H.J., Menke, D., Wehmeyer, O., Heinzmann, Ulrich, Fuchs, D., Bulicke, P., Wedwoski, M., Ulm, G., Heidemann, K.F., and Osterried, K. “Multilayer-coated soft x-ray diffraction gratings for synchrotron radiation applications”. Proc. SPIE 3150 (1997).
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