Large area soft x-ray projection lithography using multilayer mirrors structured by RIE

Rahn S, Kloidt A, Kleineberg U, Schmiedeskamp B, Kadel K, Schomburg WK, Hormes J, Heinzmann U (1992)
Spie Proc. 1992 (Soc. Phot. Opt. Inst. Eng.) 1742.

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Rahn S, Kloidt A, Kleineberg U, et al. Large area soft x-ray projection lithography using multilayer mirrors structured by RIE. Spie Proc. 1992 (Soc. Phot. Opt. Inst. Eng.). 1992;1742.
Rahn, S., Kloidt, A., Kleineberg, U., Schmiedeskamp, B., Kadel, K., Schomburg, W. K., Hormes, J., et al. (1992). Large area soft x-ray projection lithography using multilayer mirrors structured by RIE. Spie Proc. 1992 (Soc. Phot. Opt. Inst. Eng.), 1742.
Rahn, S., Kloidt, A., Kleineberg, U., Schmiedeskamp, B., Kadel, K., Schomburg, W. K., Hormes, J., and Heinzmann, U. (1992). Large area soft x-ray projection lithography using multilayer mirrors structured by RIE. Spie Proc. 1992 (Soc. Phot. Opt. Inst. Eng.) 1742.
Rahn, S., et al., 1992. Large area soft x-ray projection lithography using multilayer mirrors structured by RIE. Spie Proc. 1992 (Soc. Phot. Opt. Inst. Eng.), 1742.
S. Rahn, et al., “Large area soft x-ray projection lithography using multilayer mirrors structured by RIE”, Spie Proc. 1992 (Soc. Phot. Opt. Inst. Eng.), vol. 1742, 1992.
Rahn, S., Kloidt, A., Kleineberg, U., Schmiedeskamp, B., Kadel, K., Schomburg, W.K., Hormes, J., Heinzmann, U.: Large area soft x-ray projection lithography using multilayer mirrors structured by RIE. Spie Proc. 1992 (Soc. Phot. Opt. Inst. Eng.). 1742, (1992).
Rahn, S., Kloidt, A., Kleineberg, U., Schmiedeskamp, B., Kadel, K., Schomburg, W.K., Hormes, J., and Heinzmann, Ulrich. “Large area soft x-ray projection lithography using multilayer mirrors structured by RIE”. Spie Proc. 1992 (Soc. Phot. Opt. Inst. Eng.) 1742 (1992).
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