Comparison between computational modeling and experiment for a CVD growth process of silicon films

Atakan B, Hofstätter M, Kohse-Höinghaus K (2001)
In: Proceedings of the Electrochemical Society., 2001-13. 268-275.

Download
No fulltext has been uploaded. References only!
Conference Paper | Published | English

No fulltext has been uploaded

Author
; ;
Publishing Year
PUB-ID

Cite this

Atakan B, Hofstätter M, Kohse-Höinghaus K. Comparison between computational modeling and experiment for a CVD growth process of silicon films. In: Proceedings of the Electrochemical Society. Vol 2001-13. 2001: 268-275.
Atakan, B., Hofstätter, M., & Kohse-Höinghaus, K. (2001). Comparison between computational modeling and experiment for a CVD growth process of silicon films. Proceedings of the Electrochemical Society, 2001-13, 268-275
Atakan, B., Hofstätter, M., and Kohse-Höinghaus, K. (2001). “Comparison between computational modeling and experiment for a CVD growth process of silicon films” in Proceedings of the Electrochemical Society, vol. 2001-13, 268-275.
Atakan, B., Hofstätter, M., & Kohse-Höinghaus, K., 2001. Comparison between computational modeling and experiment for a CVD growth process of silicon films. In Proceedings of the Electrochemical Society. no.2001-13 pp. 268-275.
B. Atakan, M. Hofstätter, and K. Kohse-Höinghaus, “Comparison between computational modeling and experiment for a CVD growth process of silicon films”, Proceedings of the Electrochemical Society, vol. 2001-13, 2001, pp.268-275.
Atakan, B., Hofstätter, M., Kohse-Höinghaus, K.: Comparison between computational modeling and experiment for a CVD growth process of silicon films. Proceedings of the Electrochemical Society. 2001-13, p. 268-275. (2001).
Atakan, Burak, Hofstätter, Michael, and Kohse-Höinghaus, Katharina. “Comparison between computational modeling and experiment for a CVD growth process of silicon films”. Proceedings of the Electrochemical Society. 2001.Vol. 2001-13. 268-275.
This data publication is cited in the following publications:
This publication cites the following data publications:

Export

0 Marked Publications

Open Data PUB

Search this title in

Google Scholar