Nanopatterning of Au absorber films on Mo/Si EUV multilayer mirrors by STM lithography in self-assembled monolayers

Sundermann M, Hartwich J, Rott K, Meyners D, Majkova E, Kleineberg U, Grunze M, Heinzmann U (2000)
Surf.Sci 454-456: 1104-1109.

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Zeitschriftenaufsatz | Veröffentlicht | Englisch
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Zeitschriftentitel
Surf.Sci
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454-456
Seite
1104-1109
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Sundermann M, Hartwich J, Rott K, et al. Nanopatterning of Au absorber films on Mo/Si EUV multilayer mirrors by STM lithography in self-assembled monolayers. Surf.Sci. 2000;454-456:1104-1109.
Sundermann, M., Hartwich, J., Rott, K., Meyners, D., Majkova, E., Kleineberg, U., Grunze, M., et al. (2000). Nanopatterning of Au absorber films on Mo/Si EUV multilayer mirrors by STM lithography in self-assembled monolayers. Surf.Sci, 454-456, 1104-1109. doi:10.1016/S0039-6028(00)00208-9
Sundermann, M., Hartwich, J., Rott, K., Meyners, D., Majkova, E., Kleineberg, U., Grunze, M., and Heinzmann, U. (2000). Nanopatterning of Au absorber films on Mo/Si EUV multilayer mirrors by STM lithography in self-assembled monolayers. Surf.Sci 454-456, 1104-1109.
Sundermann, M., et al., 2000. Nanopatterning of Au absorber films on Mo/Si EUV multilayer mirrors by STM lithography in self-assembled monolayers. Surf.Sci, 454-456, p 1104-1109.
M. Sundermann, et al., “Nanopatterning of Au absorber films on Mo/Si EUV multilayer mirrors by STM lithography in self-assembled monolayers”, Surf.Sci, vol. 454-456, 2000, pp. 1104-1109.
Sundermann, M., Hartwich, J., Rott, K., Meyners, D., Majkova, E., Kleineberg, U., Grunze, M., Heinzmann, U.: Nanopatterning of Au absorber films on Mo/Si EUV multilayer mirrors by STM lithography in self-assembled monolayers. Surf.Sci. 454-456, 1104-1109 (2000).
Sundermann, M., Hartwich, J., Rott, Karsten, Meyners, D., Majkova, E., Kleineberg, U., Grunze, M., and Heinzmann, Ulrich. “Nanopatterning of Au absorber films on Mo/Si EUV multilayer mirrors by STM lithography in self-assembled monolayers”. Surf.Sci 454-456 (2000): 1104-1109.