Bufferlayer and Caplayer Engineering of Mo/Si EUVL Multilayer Mirrors

Kleineberg U, Westerwalbesloh T, Wehmeyer O, Sundermann M, Brechling A, Heinzmann U, Haidl M, Müllender S (2001)
SPIE Proc. 4506: 113-113.

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Kleineberg U, Westerwalbesloh T, Wehmeyer O, et al. Bufferlayer and Caplayer Engineering of Mo/Si EUVL Multilayer Mirrors. SPIE Proc. 4506. 2001:113-113.
Kleineberg, U., Westerwalbesloh, T., Wehmeyer, O., Sundermann, M., Brechling, A., Heinzmann, U., Haidl, M., et al. (2001). Bufferlayer and Caplayer Engineering of Mo/Si EUVL Multilayer Mirrors. SPIE Proc. 4506, 113-113.
Kleineberg, U., Westerwalbesloh, T., Wehmeyer, O., Sundermann, M., Brechling, A., Heinzmann, U., Haidl, M., and Müllender, S. (2001). Bufferlayer and Caplayer Engineering of Mo/Si EUVL Multilayer Mirrors. SPIE Proc. 4506, 113-113.
Kleineberg, U., et al., 2001. Bufferlayer and Caplayer Engineering of Mo/Si EUVL Multilayer Mirrors. SPIE Proc. 4506, , p 113-113.
U. Kleineberg, et al., “Bufferlayer and Caplayer Engineering of Mo/Si EUVL Multilayer Mirrors”, SPIE Proc. 4506, 2001, pp. 113-113.
Kleineberg, U., Westerwalbesloh, T., Wehmeyer, O., Sundermann, M., Brechling, A., Heinzmann, U., Haidl, M., Müllender, S.: Bufferlayer and Caplayer Engineering of Mo/Si EUVL Multilayer Mirrors. SPIE Proc. 4506. 113-113 (2001).
Kleineberg, U., Westerwalbesloh, Th., Wehmeyer, O., Sundermann, M., Brechling, Armin, Heinzmann, Ulrich, Haidl, M., and Müllender, S. “Bufferlayer and Caplayer Engineering of Mo/Si EUVL Multilayer Mirrors”. SPIE Proc. 4506 (2001): 113-113.
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