Structural investigation of alumina thin films deposited by chemical vapor deposition

Bahlawane N, Blittersdorf S, Kohse-Höinghaus K, Atakan B, Müller J (2003)
In: Surface engineering 2002 - synthesis, characterization and applications. Kumar A (Ed); Materials Research Society Symposium Proceedings, 750. Warrendale, Pa.: Materials Research Society: 279-284.

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Editor
Kumar, Ashok
Publishing Year
Conference
Symposium Y: Surface Engineering 2002
Location
Boston, Mass.
Conference Date
2002-12-02 – 2002-12-05
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Bahlawane N, Blittersdorf S, Kohse-Höinghaus K, Atakan B, Müller J. Structural investigation of alumina thin films deposited by chemical vapor deposition. In: Kumar A, ed. Surface engineering 2002 - synthesis, characterization and applications. Materials Research Society Symposium Proceedings. Vol 750. Warrendale, Pa.: Materials Research Society; 2003: 279-284.
Bahlawane, N., Blittersdorf, S., Kohse-Höinghaus, K., Atakan, B., & Müller, J. (2003). Structural investigation of alumina thin films deposited by chemical vapor deposition. In A. Kumar (Ed.), Materials Research Society Symposium Proceedings: Vol. 750. Surface engineering 2002 - synthesis, characterization and applications (pp. 279-284). Warrendale, Pa.: Materials Research Society.
Bahlawane, N., Blittersdorf, S., Kohse-Höinghaus, K., Atakan, B., and Müller, J. (2003). “Structural investigation of alumina thin films deposited by chemical vapor deposition” in Surface engineering 2002 - synthesis, characterization and applications, Kumar, A. ed. Materials Research Society Symposium Proceedings, vol. 750, (Warrendale, Pa.: Materials Research Society), 279-284.
Bahlawane, N., et al., 2003. Structural investigation of alumina thin films deposited by chemical vapor deposition. In A. Kumar, ed. Surface engineering 2002 - synthesis, characterization and applications. Materials Research Society Symposium Proceedings. no.750 Warrendale, Pa.: Materials Research Society, pp. 279-284.
N. Bahlawane, et al., “Structural investigation of alumina thin films deposited by chemical vapor deposition”, Surface engineering 2002 - synthesis, characterization and applications, A. Kumar, ed., Materials Research Society Symposium Proceedings, vol. 750, Warrendale, Pa.: Materials Research Society, 2003, pp.279-284.
Bahlawane, N., Blittersdorf, S., Kohse-Höinghaus, K., Atakan, B., Müller, J.: Structural investigation of alumina thin films deposited by chemical vapor deposition. In: Kumar, A. (ed.) Surface engineering 2002 - synthesis, characterization and applications. Materials Research Society Symposium Proceedings. 750, p. 279-284. Materials Research Society, Warrendale, Pa. (2003).
Bahlawane, Naoufal, Blittersdorf, Sabine, Kohse-Höinghaus, Katharina, Atakan, Burak, and Müller, Jürgen. “Structural investigation of alumina thin films deposited by chemical vapor deposition”. Surface engineering 2002 - synthesis, characterization and applications. Ed. Ashok Kumar. Warrendale, Pa.: Materials Research Society, 2003.Vol. 750. Materials Research Society Symposium Proceedings. 279-284.
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