Plasma Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer Single Layers

Wonisch A, Hamelmann F, Hachmann W, Heinzmann U (2006)
In: Functional Properties of Nanostructured Materials / Eds. R. Kassing et al. Springer: 351-354.

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Wonisch A, Hamelmann F, Hachmann W, Heinzmann U. Plasma Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer Single Layers. In: Functional Properties of Nanostructured Materials / Eds. R. Kassing et al. Springer; 2006: 351-354.
Wonisch, A., Hamelmann, F., Hachmann, W., & Heinzmann, U. (2006). Plasma Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer Single Layers. Functional Properties of Nanostructured Materials / Eds. R. Kassing et al., 351-354.
Wonisch, A., Hamelmann, F., Hachmann, W., and Heinzmann, U. (2006). “Plasma Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer Single Layers” in Functional Properties of Nanostructured Materials / Eds. R. Kassing et al. (Springer), 351-354.
Wonisch, A., et al., 2006. Plasma Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer Single Layers. In Functional Properties of Nanostructured Materials / Eds. R. Kassing et al. Springer, pp. 351-354.
A. Wonisch, et al., “Plasma Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer Single Layers”, Functional Properties of Nanostructured Materials / Eds. R. Kassing et al., Springer: 2006, pp.351-354.
Wonisch, A., Hamelmann, F., Hachmann, W., Heinzmann, U.: Plasma Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer Single Layers. Functional Properties of Nanostructured Materials / Eds. R. Kassing et al. p. 351-354. Springer (2006).
Wonisch, Andreas, Hamelmann, Frank, Hachmann, Wiebke, and Heinzmann, Ulrich. “Plasma Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer Single Layers”. Functional Properties of Nanostructured Materials / Eds. R. Kassing et al. Springer, 2006. 351-354.
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