Mass spectrometry as a basis for the selection of CVD precursors

Haase T, Bahlawane N, Strong JT, Jakob A, Shen Y, Lang H, Kohse-Höinghaus K (2005)
In: PROCEEDINGS OF EUROCVD-15. The Electrochemical Society: 276-283.

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Konferenzbeitrag | Veröffentlicht | Englisch
Autor
; ; ; ; ; ;
Erscheinungsjahr
Titel des Konferenzbandes
PROCEEDINGS OF EUROCVD-15
Seite
276-283
Konferenz
EUROCVD
Konferenzort
Bochum, Germany
Konferenzdatum
2005-09-04
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Haase T, Bahlawane N, Strong JT, et al. Mass spectrometry as a basis for the selection of CVD precursors. In: PROCEEDINGS OF EUROCVD-15. The Electrochemical Society; 2005: 276-283.
Haase, T., Bahlawane, N., Strong, J. T., Jakob, A., Shen, Y., Lang, H., & Kohse-Höinghaus, K. (2005). Mass spectrometry as a basis for the selection of CVD precursors. PROCEEDINGS OF EUROCVD-15, 276-283. The Electrochemical Society.
Haase, T., Bahlawane, N., Strong, J. T., Jakob, A., Shen, Y., Lang, H., and Kohse-Höinghaus, K. (2005). “Mass spectrometry as a basis for the selection of CVD precursors” in PROCEEDINGS OF EUROCVD-15 (The Electrochemical Society), 276-283.
Haase, T., et al., 2005. Mass spectrometry as a basis for the selection of CVD precursors. In PROCEEDINGS OF EUROCVD-15. The Electrochemical Society, pp. 276-283.
T. Haase, et al., “Mass spectrometry as a basis for the selection of CVD precursors”, PROCEEDINGS OF EUROCVD-15, The Electrochemical Society, 2005, pp.276-283.
Haase, T., Bahlawane, N., Strong, J.T., Jakob, A., Shen, Y., Lang, H., Kohse-Höinghaus, K.: Mass spectrometry as a basis for the selection of CVD precursors. PROCEEDINGS OF EUROCVD-15. p. 276-283. The Electrochemical Society (2005).
Haase, Thomas, Bahlawane, Naoufal, Strong, J.T., Jakob, A., Shen, Y., Lang, H., and Kohse-Höinghaus, Katharina. “Mass spectrometry as a basis for the selection of CVD precursors”. PROCEEDINGS OF EUROCVD-15. The Electrochemical Society, 2005. 276-283.

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