Sub-micron grating formation in Ta2O5-waveguides by femtosecond UV-laser ablation

Beinhorn F, Ihlemann J, Simon P, Marowsky G, Maisenhölder B, Edlinger J, Neuschäfer D, Anselmetti D (1999)
Applied surface science 138-139: 107-110.

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Sub-micron-period surface gratings on Ta2O5 waveguide layers were produced by ablation with a sub-ps-UV-laser. The structure is generated by projection imaging of a primary transmission grating mask. A grating of 500 nm period with a surface modulation depth of 10 nm on a sample area of about 300 µm × 300 µm can be produced with a single laser pulse of about 100 mJ/cm² at 248 nm. Adjustment of the modulation depth to specific requirements can be accomplished by varying laser fluence or pulse number. The structures can be used as grating couplers.
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Beinhorn F, Ihlemann J, Simon P, et al. Sub-micron grating formation in Ta2O5-waveguides by femtosecond UV-laser ablation. Applied surface science. 1999;138-139:107-110.
Beinhorn, F., Ihlemann, J., Simon, P., Marowsky, G., Maisenhölder, B., Edlinger, J., Neuschäfer, D., et al. (1999). Sub-micron grating formation in Ta2O5-waveguides by femtosecond UV-laser ablation. Applied surface science, 138-139, 107-110.
Beinhorn, F., Ihlemann, J., Simon, P., Marowsky, G., Maisenhölder, B., Edlinger, J., Neuschäfer, D., and Anselmetti, D. (1999). Sub-micron grating formation in Ta2O5-waveguides by femtosecond UV-laser ablation. Applied surface science 138-139, 107-110.
Beinhorn, F., et al., 1999. Sub-micron grating formation in Ta2O5-waveguides by femtosecond UV-laser ablation. Applied surface science, 138-139, p 107-110.
F. Beinhorn, et al., “Sub-micron grating formation in Ta2O5-waveguides by femtosecond UV-laser ablation”, Applied surface science, vol. 138-139, 1999, pp. 107-110.
Beinhorn, F., Ihlemann, J., Simon, P., Marowsky, G., Maisenhölder, B., Edlinger, J., Neuschäfer, D., Anselmetti, D.: Sub-micron grating formation in Ta2O5-waveguides by femtosecond UV-laser ablation. Applied surface science. 138-139, 107-110 (1999).
Beinhorn, Frank, Ihlemann, Jürgen, Simon, Peter, Marowsky, Gerd, Maisenhölder, Bernd, Edlinger, Johannes, Neuschäfer, Dieter, and Anselmetti, Dario. “Sub-micron grating formation in Ta2O5-waveguides by femtosecond UV-laser ablation”. Applied surface science 138-139 (1999): 107-110.
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