Mo/Si multilayer coated laminar phase and ruled blaze gratings for the soft x-ray region

Kleineberg U, Stock HJ, Kloidt A, Osterried K, Menke D, Schmiedeskamp B, Heinzmann U, Fuchs D, Muller P, Scholze F, Ulm G, et al. (1996)
In: JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA. 80. ELSEVIER SCIENCE BV: 389-392.

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Mo-Si multilayer coated laminar and blase gratings with about 1200 L/mm have been manufactured for near normal incidence operation at soft x-ray wavelengths above the Si L-edge lambda greater than or equal to 12.4 nm. Higher diffraction efficiencies (up to 11% at lambda = 13.6 nm), as opposed to simple amplitude gratings, are achieved for a soft x-ray laminar phase grating coated with 24 Mo/Si bilayers. Two mechanically ruled blaze gratings have been coated with Mo/Si multilayers. The maximum Ist order efficiency of 32% at lambda = 13.8 nm has been achieved for one of them due to a refined groove forming technique and an optimum matching of the blaze angle (0.8 degrees) and the bilayer thickness (10.5 nm).
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Kleineberg U, Stock HJ, Kloidt A, et al. Mo/Si multilayer coated laminar phase and ruled blaze gratings for the soft x-ray region. In: JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA. Vol 80. ELSEVIER SCIENCE BV; 1996: 389-392.
Kleineberg, U., Stock, H. J., Kloidt, A., Osterried, K., Menke, D., Schmiedeskamp, B., Heinzmann, U., et al. (1996). Mo/Si multilayer coated laminar phase and ruled blaze gratings for the soft x-ray region. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 80, 389-392.
Kleineberg, U., Stock, H. J., Kloidt, A., Osterried, K., Menke, D., Schmiedeskamp, B., Heinzmann, U., Fuchs, D., Muller, P., Scholze, F., et al. (1996). “Mo/Si multilayer coated laminar phase and ruled blaze gratings for the soft x-ray region” in JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, vol. 80, (ELSEVIER SCIENCE BV), 389-392.
Kleineberg, U., et al., 1996. Mo/Si multilayer coated laminar phase and ruled blaze gratings for the soft x-ray region. In JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA. no.80 ELSEVIER SCIENCE BV, pp. 389-392.
U. Kleineberg, et al., “Mo/Si multilayer coated laminar phase and ruled blaze gratings for the soft x-ray region”, JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, vol. 80, ELSEVIER SCIENCE BV, 1996, pp.389-392.
Kleineberg, U., Stock, H.J., Kloidt, A., Osterried, K., Menke, D., Schmiedeskamp, B., Heinzmann, U., Fuchs, D., Muller, P., Scholze, F., Ulm, G., Heidemann, K.F., Nelles, B.: Mo/Si multilayer coated laminar phase and ruled blaze gratings for the soft x-ray region. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA. 80, p. 389-392. ELSEVIER SCIENCE BV (1996).
Kleineberg, U, Stock, HJ, Kloidt, A, Osterried, K, Menke, D, Schmiedeskamp, B, Heinzmann, Ulrich, Fuchs, D, Muller, P, Scholze, F, Ulm, G, Heidemann, KF, and Nelles, B. “Mo/Si multilayer coated laminar phase and ruled blaze gratings for the soft x-ray region”. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA. ELSEVIER SCIENCE BV, 1996.Vol. 80. 389-392.
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