Thermal stability of W1-xSix/Si multilayer reflective coatings under high intensity excimer laser pulses

D'Anna E, Luches A, Martino M, Brunel M, Majkova E, Luby S, Senderak R, Jergel M, Hamelmann F, Kleineberg U, Heinzmann U (1996)
Applied Surface Science 106: 166-170.

Download
No fulltext has been uploaded. References only!
Conference Paper | Published | English

No fulltext has been uploaded

Author
; ; ; ; ; ; ; ; ; ;
Abstract
UHV e-beam evaporated W1-xSix/Si multilayers (MLs) with four different compositions (x = 0, 0.33, 0.5 and 0.66) were XeCl laser irradiated at different fluences F less than or equal to 0.6 J cm(-2) with number of pulses N less than or equal to 100, The samples were analyzed by soft X-ray reflectivity, X-ray diffraction and resistometry measurements. It was shown, that the hardness of the samples against laser irradiation increases with increasing x up to x = 0.5, then goes down again. This behavior is explained by the interplay of the suppression of the interdiffusion at the interfaces of MLs with increasing content of Si in W and the gradual decrease of the refractory nature of W when it is diluted by Si.
Publishing Year
ISSN
PUB-ID

Cite this

D'Anna E, Luches A, Martino M, et al. Thermal stability of W1-xSix/Si multilayer reflective coatings under high intensity excimer laser pulses. Applied Surface Science. 1996;106:166-170.
D'Anna, E., Luches, A., Martino, M., Brunel, M., Majkova, E., Luby, S., Senderak, R., et al. (1996). Thermal stability of W1-xSix/Si multilayer reflective coatings under high intensity excimer laser pulses. Applied Surface Science, 106, 166-170. doi:10.1016/S0169-4332(96)00365-0
D'Anna, E., Luches, A., Martino, M., Brunel, M., Majkova, E., Luby, S., Senderak, R., Jergel, M., Hamelmann, F., Kleineberg, U., et al. (1996). Thermal stability of W1-xSix/Si multilayer reflective coatings under high intensity excimer laser pulses. Applied Surface Science 106, 166-170.
D'Anna, E., et al., 1996. Thermal stability of W1-xSix/Si multilayer reflective coatings under high intensity excimer laser pulses. Applied Surface Science, 106, p 166-170.
E. D'Anna, et al., “Thermal stability of W1-xSix/Si multilayer reflective coatings under high intensity excimer laser pulses”, Applied Surface Science, vol. 106, 1996, pp. 166-170.
D'Anna, E., Luches, A., Martino, M., Brunel, M., Majkova, E., Luby, S., Senderak, R., Jergel, M., Hamelmann, F., Kleineberg, U., Heinzmann, U.: Thermal stability of W1-xSix/Si multilayer reflective coatings under high intensity excimer laser pulses. Applied Surface Science. 106, 166-170 (1996).
D'Anna, E., Luches, A, Martino, M, Brunel, M, Majkova, E, Luby, S, Senderak, R, Jergel, M, Hamelmann, Frank, Kleineberg, U, and Heinzmann, Ulrich. “Thermal stability of W1-xSix/Si multilayer reflective coatings under high intensity excimer laser pulses”. Applied Surface Science 106 (1996): 166-170.
This data publication is cited in the following publications:
This publication cites the following data publications:

Export

0 Marked Publications

Open Data PUB

Web of Science

View record in Web of Science®

Search this title in

Google Scholar