Thermal stability of W1-xSix/Si multilayer reflective coatings under high intensity excimer laser pulses

D'Anna E, Luches A, Martino M, Brunel M, Majkova E, Luby S, Senderak R, Jergel M, Hamelmann F, Kleineberg U, Heinzmann U (1996)
In: APPLIED SURFACE SCIENCE. 106. ELSEVIER SCIENCE BV: 166-170.

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Abstract
UHV e-beam evaporated W1-xSix/Si multilayers (MLs) with four different compositions (x = 0, 0.33, 0.5 and 0.66) were XeCl laser irradiated at different fluences F less than or equal to 0.6 J cm(-2) with number of pulses N less than or equal to 100, The samples were analyzed by soft X-ray reflectivity, X-ray diffraction and resistometry measurements. It was shown, that the hardness of the samples against laser irradiation increases with increasing x up to x = 0.5, then goes down again. This behavior is explained by the interplay of the suppression of the interdiffusion at the interfaces of MLs with increasing content of Si in W and the gradual decrease of the refractory nature of W when it is diluted by Si.
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D'Anna E, Luches A, Martino M, et al. Thermal stability of W1-xSix/Si multilayer reflective coatings under high intensity excimer laser pulses. In: APPLIED SURFACE SCIENCE. Vol 106. ELSEVIER SCIENCE BV; 1996: 166-170.
D'Anna, E., Luches, A., Martino, M., Brunel, M., Majkova, E., Luby, S., Senderak, R., et al. (1996). Thermal stability of W1-xSix/Si multilayer reflective coatings under high intensity excimer laser pulses. APPLIED SURFACE SCIENCE, 106, 166-170.
D'Anna, E., Luches, A., Martino, M., Brunel, M., Majkova, E., Luby, S., Senderak, R., Jergel, M., Hamelmann, F., Kleineberg, U., et al. (1996). “Thermal stability of W1-xSix/Si multilayer reflective coatings under high intensity excimer laser pulses” in APPLIED SURFACE SCIENCE, vol. 106, (ELSEVIER SCIENCE BV), 166-170.
D'Anna, E., et al., 1996. Thermal stability of W1-xSix/Si multilayer reflective coatings under high intensity excimer laser pulses. In APPLIED SURFACE SCIENCE. no.106 ELSEVIER SCIENCE BV, pp. 166-170.
E. D'Anna, et al., “Thermal stability of W1-xSix/Si multilayer reflective coatings under high intensity excimer laser pulses”, APPLIED SURFACE SCIENCE, vol. 106, ELSEVIER SCIENCE BV, 1996, pp.166-170.
D'Anna, E., Luches, A., Martino, M., Brunel, M., Majkova, E., Luby, S., Senderak, R., Jergel, M., Hamelmann, F., Kleineberg, U., Heinzmann, U.: Thermal stability of W1-xSix/Si multilayer reflective coatings under high intensity excimer laser pulses. APPLIED SURFACE SCIENCE. 106, p. 166-170. ELSEVIER SCIENCE BV (1996).
D'Anna, E., Luches, A, Martino, M, Brunel, M, Majkova, E, Luby, S, Senderak, R, Jergel, M, Hamelmann, Frank, Kleineberg, U, and Heinzmann, Ulrich. “Thermal stability of W1-xSix/Si multilayer reflective coatings under high intensity excimer laser pulses”. APPLIED SURFACE SCIENCE. ELSEVIER SCIENCE BV, 1996.Vol. 106. 166-170.
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