Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors

Stock HJ, Hamelmann F, Kleineberg U, Menke D, Schmiedeskamp B, Osterried K, Heidemann KF, Heinzmann U (1997)
APPLIED OPTICS 36(7): 1650-1654.

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Abstract
Zerodur and BK7 glass substrates (developed by Fa. Glaswerke Schott, D-55014 Mainz, Germany) from Carl Zeiss Oberkochen polished to a standard surface roughness of sigma = 0.8 nm rms were coated with a C layer by electron-beam evaporation in the UHV. The roughness of the C-layer surfaces is reduced to 0.6 nm rms. A normal-incidence reflectance of 50% at a wavelength of 13 nm was measured for a Mo/Si multilayer soft-x-ray mirror with 30 double layers (N = 30) deposited onto the BK7/C substrate, whereas a similar Mo/Si multilayer (N = 30) evaporated directly onto the bare BK7 surface turned out to show a reflectance of only 42%. (C) 1997 Optical Society of America.
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Stock HJ, Hamelmann F, Kleineberg U, et al. Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors. APPLIED OPTICS. 1997;36(7):1650-1654.
Stock, H. J., Hamelmann, F., Kleineberg, U., Menke, D., Schmiedeskamp, B., Osterried, K., Heidemann, K. F., et al. (1997). Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors. APPLIED OPTICS, 36(7), 1650-1654.
Stock, H. J., Hamelmann, F., Kleineberg, U., Menke, D., Schmiedeskamp, B., Osterried, K., Heidemann, K. F., and Heinzmann, U. (1997). Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors. APPLIED OPTICS 36, 1650-1654.
Stock, H.J., et al., 1997. Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors. APPLIED OPTICS, 36(7), p 1650-1654.
H.J. Stock, et al., “Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors”, APPLIED OPTICS, vol. 36, 1997, pp. 1650-1654.
Stock, H.J., Hamelmann, F., Kleineberg, U., Menke, D., Schmiedeskamp, B., Osterried, K., Heidemann, K.F., Heinzmann, U.: Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors. APPLIED OPTICS. 36, 1650-1654 (1997).
Stock, HJ, Hamelmann, Frank, Kleineberg, U, Menke, D, Schmiedeskamp, B, Osterried, K, Heidemann, KF, and Heinzmann, Ulrich. “Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors”. APPLIED OPTICS 36.7 (1997): 1650-1654.
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PMID: 23787628

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