Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors

Stock HJ, Hamelmann F, Kleineberg U, Menke D, Schmiedeskamp B, Osterried K, Heidemann KF, Heinzmann U (1997)
APPLIED OPTICS 36(7): 1650-1654.

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Zeitschriftenaufsatz | Veröffentlicht | Englisch
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Abstract / Bemerkung
Zerodur and BK7 glass substrates (developed by Fa. Glaswerke Schott, D-55014 Mainz, Germany) from Carl Zeiss Oberkochen polished to a standard surface roughness of sigma = 0.8 nm rms were coated with a C layer by electron-beam evaporation in the UHV. The roughness of the C-layer surfaces is reduced to 0.6 nm rms. A normal-incidence reflectance of 50% at a wavelength of 13 nm was measured for a Mo/Si multilayer soft-x-ray mirror with 30 double layers (N = 30) deposited onto the BK7/C substrate, whereas a similar Mo/Si multilayer (N = 30) evaporated directly onto the bare BK7 surface turned out to show a reflectance of only 42%. (C) 1997 Optical Society of America.
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Zeitschriftentitel
APPLIED OPTICS
Band
36
Zeitschriftennummer
7
Seite
1650-1654
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Stock HJ, Hamelmann F, Kleineberg U, et al. Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors. APPLIED OPTICS. 1997;36(7):1650-1654.
Stock, H. J., Hamelmann, F., Kleineberg, U., Menke, D., Schmiedeskamp, B., Osterried, K., Heidemann, K. F., et al. (1997). Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors. APPLIED OPTICS, 36(7), 1650-1654. doi:10.1364/AO.36.001650
Stock, H. J., Hamelmann, F., Kleineberg, U., Menke, D., Schmiedeskamp, B., Osterried, K., Heidemann, K. F., and Heinzmann, U. (1997). Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors. APPLIED OPTICS 36, 1650-1654.
Stock, H.J., et al., 1997. Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors. APPLIED OPTICS, 36(7), p 1650-1654.
H.J. Stock, et al., “Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors”, APPLIED OPTICS, vol. 36, 1997, pp. 1650-1654.
Stock, H.J., Hamelmann, F., Kleineberg, U., Menke, D., Schmiedeskamp, B., Osterried, K., Heidemann, K.F., Heinzmann, U.: Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors. APPLIED OPTICS. 36, 1650-1654 (1997).
Stock, HJ, Hamelmann, Frank, Kleineberg, U, Menke, D, Schmiedeskamp, B, Osterried, K, Heidemann, KF, and Heinzmann, Ulrich. “Carbon buffer layers for smoothing superpolished glass surfaces as substrates for molybdenum/silicon multilayer soft-x-ray mirrors”. APPLIED OPTICS 36.7 (1997): 1650-1654.

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Enhancement of the reflectivity of Al/Zr multilayers by a novel structure.
Zhong Q, Zhang Z, Qi R, Li J, Wang Z, Le Guen K, André JM, Jonnard P., Opt Express 21(12), 2013
PMID: 23787628

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